IP Library Granted Patent US 7,514,203
Granted Patent B2
US 7,514,203 · App. 11/884,185 · Granted Apr 7, 2009

Positive photoresist composition

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Quick Facts
Patent No.
US 7,514,203
App. No.
11/884,185
Granted
Apr 7, 2009
Kind
B2
Abstract

Disclosed is a positive photoresist composition used for a liquid crystal display. The positive photoresist composition of the present invention includes 3 to 50% by weight of binder resin having a certain structure, 2 to 40% by weight of a photoactive compound and 10 to 94% by weight of an organic solvent. The positive photoresist composition according to the present invention may be useful to form a pattern for an organic insulator of a liquid crystal display, metal patterning, a bump, hole drilling and UV overcoat since it has good basic physical properties such as UV transmittance, film retention, pattern stability, chemical resistance and so on, as well as an excellent heat resistance.

Claims (18)

1. A positive photoresist composition, comprising:

3 to 50% by weights of a binder resin selected from the group consisting of a resin having the structure of a Chemical Formula 1, a resin having the structure of a Chemical Formula 2, and their mixture;

2 to 40% by weights of a photoactive compound; and

10 to 94% by weights of an organic solvent:

wherein the Chemical Formula 1 has the structure:

wherein, R 1 , R 2 and R 3 are each independently H or methyl,

R 4 is an alkyl or cycloalkyl group having 1 to 10 carbon atoms which contains an epoxy group, and

x and y represent a mole ratio of the repeating units, wherein x is 0.02 to 0.80 and y is 0.20 to 0.98, provided that the binder resin of said Chemical Formula 1 may be a random copolymer which is not limited to a given order of the repeating unit; and

wherein the Chemical Formula 2 has the structure:

wherein, R 5 , R 6 , R 7 and R 9 are each independently H or methyl;

R 8 is an alkyl or cycloalkyl group having 1 to 10 carbon atoms which contains an epoxy group;

R 10 is at least one selected from the group consisting of carboxylic acid, alkoxycarbonyl and aromatic compound which have 1 to 14 carbon atoms;

l, m and n are each a mole ratio of the repeating units, wherein l is 0.02 to 0.70, m is 0.05 to 0.60, and n is 0.01 to 0.60, provided that the binder resin of said Chemical Formula 2 may be a random copolymer which is not limited to a given order of the repeating unit.

2. The positive photoresist composition according to claim 1 , wherein the binder resin having the structure of Chemical Formula 1 has an average molecular weight of 2,000 to 300,000 and a polydispersity of 1.0 to 10.0.

3. The positive photoresist composition according to claim 1 , wherein the organic solvent comprises at least one selected from the group consisting of ethyl acetate, butyl acetate, diethylene glycol dimethyl ether, diethylene glycol dimethyl ethyl ether, methylmethoxy propionate, ethylethoxy propionate (EEP), ethyllactate, propylene glycol methyl etheracetate (PGMEA), propylene glycol methyl ether, propylene glycol propyl ether, methylcellosolveacetate, ethylcellosolveacetate, diethylene glycol methyl acetate, diethylene glycol ethyl acetate, acetone, methyl isobutyl ketone, cyclohexanone, dimethylformamide (DMF), N,N-dimethylacetamide (DMAc), N-methyl-2-pyrrolidone (NMP), γ-butyrolactone, diethylether, ethylene glycol dimethyl ether, diglyme(Diglyme), tetrahydrofuran (THF), methanol, ethanol, propanol, isopropanol, methylcellosolve, ethylcellosolve, diethylene glycol methyl ether, diethylene glycol ethyl ether, dipropylene glycol methyl ether, toluene, xylene, hexane, heptane and octane.

4. The positive photoresist composition according to claim 1 , wherein the photoactive compound is a compound having a structure in which a group naphthoquinone-1,2-diazide-5-sulfonic acid ester or naphthoquinone-1,2-diazide-4-sulfonic acid ester is substituted with a ballast having 1 to 6 hydroxyl groups.

5. The positive photoresist composition according to claim 1 , further comprising 0.0001 to 3% by weights of a silicon-based compound containing epoxy or amine group.

6. The positive photoresist composition according to claim 5 , wherein the silicon-based compound containing epoxy or amine group comprises at least one selected from the group consisting of (3-glycidoxypropyl)trimethoxysilane, (3-glycidoxypropyl)triethoxysilane, (3-glycidoxypropyl)methyldimethoxysilane, (3-glycidoxypropyl)methyldiethoxysilane, (3-glycidoxypropyl)dimethylmethoxysilane, (3-glycidoxypropyl)dimethylethoxysilane, 3,4-epoxybutyltrimethoxysilane, 3,4-epoxybutyltriethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltrimethoxysilane, 2-(3,4-epoxycyclohexyl)ethyltriethoxysilane and aminopropyl trimethoxysilane.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 27, 2014
From: SAMYANG EMS CO., LTD.
To: SAMYANG CORPORATION
Reel/Frame 032051/0892 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 9, 2007
From: MOON, BONG-SEOK; KIM, HYO-JEONG; KIM, JIN-GON; YOO, YANG-HYUN; KIM, MIN-JI; JEONG, MI-KYEONG; YOO, KWON-YIL; JUNG, NAK-CHIL; KIM, SEON-HO
To: SAMYANGEMS CO., LTD.
Reel/Frame 019727/0477 →