Surface acoustic wave device and method for manufacturing the same
View Patent ↗A surface acoustic wave device includes a piezoelectric substrate and a lid spaced apart from each other oppositely by a specific interval. A comb electrode and a pad electrode are provided to the piezoelectric substrate on a main surface on the lid side, and an external terminal is provided to the lid on a surface on the opposite side to the piezoelectric substrate. Further, the surface acoustic wave device includes a connection electrode that electrically connects the pad electrode and the external terminal, and an insulator interposed between at least one of the main surface of the piezoelectric substrate and the pad electrode and the lid.
1. A surface acoustic wave device having an outer peripheral portion in a circumferential direction thereof, said surface acoustic wave device comprising:
a piezoelectric substrate including a main surface with a comb electrode and a pad electrode disposed on the main surface;
a lid disposed opposite the main surface of the piezoelectric substrate, the lid including a first surface facing the main surface of the piezoelectric substrate and a second surface on a side opposite the first surface, and including an external terminal disposed on the second surface;
a connection electrode that electrically connects the pad electrode and the external terminal; and
an insulator interposed between at least one of the main surface of the piezoelectric substrate and the pad electrode and the lid,
wherein only the piezoelectric substrate, the insulator, and the lid form a laminated portion at at least a portion of the outer peripheral portion of the surface acoustic wave device, and
the insulator has an elasticity modulus between an elasticity modulus of the piezoelectric substrate and an elasticity modulus of the lid.
2. The surface acoustic wave device according to claim 1 , wherein:
the insulator is interposed at least between the pad electrode and the lid, and the connection electrode penetrates through the insulator and the lid.
3. The surface acoustic wave device according to claim 1 , wherein:
the insulator is interposed between the pad electrode and the lid and between the main surface of the piezoelectric substrate and the lid so as to surround an active region in the main surface of the piezoelectric substrate with which the comb electrode is provided.
4. The surface acoustic wave device according to claim 3 , wherein:
the piezoelectric substrate has at least two active regions and the insulator is disposed so as to surround each active region separately.
5. The surface acoustic wave device according to claim 1 , wherein:
the lid has a concave portion that forms a dent in a region opposing an active region in the main surface of the piezoelectric substrate on which the comb electrode is disposed.
6. The surface acoustic wave device according to claim 1 , wherein:
the piezoelectric substrate includes a surface opposite to the main surface and a resin layer is disposed on the piezoelectric substrate on the surface opposite to the main surface.
7. The surface acoustic wave device according to claim 1 , wherein:
the lid includes an end face, and the connection electrode is disposed on the end face of the lid.
8. The surface acoustic wave device according to claim 1 , wherein:
the insulator includes at least a resin layer.
9. The surface acoustic wave device according to claim 1 , wherein:
the piezoelectric substrate, the insulator and the lid are configured and arranged so as to prevent chipping during manufacturing.