IP Library Granted Patent US 7,691,660
Granted Patent B2
US 7,691,660 · App. 11/889,666 · Granted Apr 6, 2010

Methods of manufacturing microelectronic imaging units on a microfeature workpiece

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Quick Facts
Patent No.
US 7,691,660
App. No.
11/889,666
Granted
Apr 6, 2010
Kind
B2
Abstract

Methods for manufacturing microelectronic imaging units and microelectronic imaging units that are formed using such methods are disclosed herein. In one embodiment, a method includes providing a plurality of imaging dies on a microfeature workpiece. The individual imaging dies include an image sensor, an integrated circuit operably coupled to the image sensor, and a plurality of external contacts operably coupled to the integrated circuit. The method further includes attaching a plurality of covers to corresponding imaging dies, cutting the microfeature workpiece to singulate the imaging dies, and coupling the singulated dies to a support member. The covers can be attached to the imaging dies before or after the workpiece is cut.

Claims (73)

1. A method of manufacturing a plurality of imaging units, the method comprising:

providing a plurality of imaging dies on a microfeature workpiece, the individual imaging dies including an image sensor, an integrated circuit operably coupled to the image sensor, and a plurality of external contacts operably coupled to the integrated circuit;

attaching a plurality of covers to corresponding imaging dies with the covers positioned over the image sensors;

forming a plurality of dams on corresponding dies after attaching the covers to the dies, the individual dams defining a perimeter around the associated cover;

cutting the microfeature workpiece to singulate the imaging dies; and

coupling the singulated dies to a single support member having terminals for electrical connection to the external contacts and pads electrically coupled to the terminals.

2. The method of claim 1 wherein cutting the microfeature workpiece occurs after attaching the covers to the imaging dies.

3. The method of claim 1 wherein attaching the covers to the imaging dies comprises: depositing discrete portions of an adhesive onto the covers and/or the imaging dies; and placing the covers on the corresponding imaging dies such that the individual portions of the adhesive are disposed outboard the image sensor and define a cell between the cover and the die.

4. The method of claim 1 wherein attaching the covers to the imaging dies comprises:

depositing discrete portions of an adhesive onto the covers and/or the imaging dies; and

placing the covers on the corresponding imaging dies such that the individual portions of the adhesive are disposed between the associated image sensor and cover.

5. The method of claim 1 wherein attaching the covers to the imaging dies comprises coupling the covers to the imaging dies with a UV-curable adhesive.

6. The method of claim 1 , further comprising forming a barrier on the support member between adjacent dies.

7. The method of claim 1 , further comprising depositing a fill material onto the support member between adjacent imaging dies to at least partially encapsulate the imaging dies.

8. The method of claim 1 wherein attaching the covers to the imaging dies comprises coupling the covers to the imaging dies such that the individual covers are disposed inboard the external contacts.

9. A method of manufacturing a plurality of imaging units, the method comprising:

coupling a plurality of singulated imaging dies to a support member, the individual imaging dies comprising an. image sensor, an integrated circuit operably coupled to the image sensor, and a plurality of external contacts operably coupled to the integrated circuit;

placing a plurality of covers on corresponding imaging dies with the covers disposed inboard the external contacts;

electrically connecting the external contacts of the imaging dies to corresponding terminals on the support member; and

forming a plurality of dams on corresponding dies after placing the covers on the imaging dies, the individual darns defining a perimeter around an associated cover.

10. The method of claim 9 wherein placing the covers on the corresponding imaging dies occurs before coupling the dies to the support member.

11. The method of claim 9 wherein:

electrically connecting the external contacts comprises wire-bonding the external contacts to the terminals with a proximal end of the individual wire-bonds attached to the contacts; and

forming the dams comprises encapsulating the proximal end of the individual wire-bonds.

12. The method of claim 9 wherein the covers include a plurality of ends, and wherein forming the dams comprises encapsulating the ends of the individual covers.

13. The method of claim 9 wherein placing the covers on the imaging dies comprises:

depositing discrete portions of an adhesive onto the covers and/or the imaging dies; and

attaching the covers to the corresponding imaging dies such that the individual portions of the adhesive are disposed outboard the image sensor and define a cell between the cover and the die.

14. The method of claim 9 wherein placing the covers on the imaging dies comprises:

depositing discrete portions of an adhesive onto the covers and/or the imaging dies; and

attaching the covers to the corresponding imaging dies such that the individual portions of the adhesive are disposed between the associated image sensor and cover.

15. The method of claim 9 , further comprising depositing a fill material onto the support member between adjacent imaging dies to at least partially encapsulate the imaging dies.

16. The method of claim 9 , further comprising:

forming a barrier on the support member between adjacent dies; and depositing a fill material onto the support member between the barrier and the imaging dies.

17. A method of manufacturing a plurality of imaging units, the method comprising:

constructing a plurality of imaging dies on a microfeature workpiece, the individual imaging dies including an image sensor, an integrated circuit operably coupled to the image sensor, and a plurality of external contacts operably coupled to the integrated circuit;

coupling a plurality of covers to corresponding imaging dies with the covers positioned over the image sensors;

cutting the microfeature workpiece to separate the imaging dies after coupling the covers to the imaging dies;

attaching the singulated dies to a support member;

wire-bonding the external contacts of the imaging dies to corresponding terminals on the support member;

forming a barrier on the support member between adjacent dies; and

depositing a fill material onto the support member between adjacent imaging dies to at least partially encapsulate the imaging dies.

18. The method of claim 17 wherein depositing the fill material comprises encapsulating at least a portion of the individual wire-bonds.

19. The method of claim 17 wherein coupling the covers to the imaging dies comprises:

depositing discrete portions of an adhesive onto the covers and/or the imaging dies; and

attaching the covers to the corresponding imaging dies such that the individual portions of the adhesive are disposed outboard the image sensor and define a cell between the cover an the die.

20. The method of claim 17 , further comprising forming a plurality of dams on corresponding dies after coupling the covers to the dies and before depositing the fill material, the individual dams defining a perimeter around the associated cover.

21. A method of manufacturing a plurality of imaging units, the method comprising:

providing a plurality of imaging dies on a microfeature workpiece, the individual imaging dies including an image sensor, an integrated circuit operably coupled to the image sensor, and a plurality of external contacts operably coupled to the integrated circuit;

attaching a plurality of covers to corresponding imaging dies with the covers positioned over the image sensors;

cutting the microfeature workpiece to singulate the imaging dies;

coupling the singulated dies to a support member;

electrically connecting the external contacts of the imaging dies to corresponding terminals on the support member;

building a barrier between adjacent dies after attaching the covers to the dies; and

forming a plurality of dams on corresponding dies, the individual dams surrounding the associated cover.

22. The method of claim 21 wherein building the barrier comprises constructing the barrier with a generally flat top surface.

23. The method of claim 21 wherein building the barrier comprises constructing the barrier outboard the terminals.

24. The method of claim 21 wherein:

electrically connecting the external contacts comprises wire-bonding the external contacts to the corresponding terminals; and building the barrier comprises constructing the barrier outboard the wire-bonds.

25. The method of claim 21 wherein forming the dams occurs after (a) electrically connecting the external contacts and the terminals and (b) attaching the covers to the imaging dies.

26. The method of claim 21 wherein:

electrically connecting the external contacts comprises wire-bonding the external contacts to the terminals with a proximal end of the individual wire-bonds attached to the contacts; and

forming the dams comprises encapsulating the proximal end of the individual wire-bonds.

27. The method of claim 21 wherein the covers include a plurality of ends, and wherein forming the dams comprises encapsulating the ends of the individual covers.

28. The method of claim 21 , further comprising depositing a fill material between the barrier and the imaging dies.

29. A method of manufacturing a plurality of imaging units, the method comprising:

providing a plurality of imaging dies on a microfeature workpiece, the individual imaging dies including an image sensor, an integrated circuit operably coupled to the image sensor, and a plurality of external contacts operably coupled to the integrated circuit;

attaching a plurality of covers to corresponding imaging dies with the covers positioned over the image sensors;

cutting the microfeature workpiece to singulate the imaging dies;

coupling the singulated dies to a single support member having terminals for electrical connection to the external contacts and pads electrically coupled to the terminals;

electrically connecting the external contacts of the imaging dies to corresponding terminals on the support member; building a barrier between adjacent dies;

forming a plurality of dams on corresponding dies after attaching the covers, the individual dams defining a perimeter around the associated cover; and

depositing a fill material onto the support member between the barrier and the imaging dies to at least partially encapsulate the imaging dies.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 23, 2016
From: DERDERIAN, JAMES M.; STREET, BRET K.; MUELLER, ERIC T.
To: MICRON TECHNOLOGY, INC.
Reel/Frame 040409/0865 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 23, 2016
From: MICRON TECHNOLOGY, INC.
To: APTINA IMAGING CORPORATION
Reel/Frame 040409/0901 →