Method of manufacturing a semiconductor device
View Patent ↗A semiconductor-device manufacturing method includes forming an element separating insulating film on a semiconductor substrate; forming a gate multilayer film for forming a gate electrode thereon; removing the gate multilayer film in an alignment mark forming area positioned on the element separating insulating film; forming a pattern of a first conductive film in the element forming area; forming an alignment mark of the first conductive film, used in photolithography, in the alignment mark forming area surrounded by the gate multilayer film; forming an inter-layer insulating film thereon; removing the inter-layer insulating film in the alignment mark forming area, so that it remains on the gate multilayer film around the alignment mark forming area; removing or thinning the element separating insulating film around the alignment mark; and forming a pattern of a second conductive film on the inter-layer insulating film by performing alignment of the photolithography by using the alignment mark.
1. A method of manufacturing a semiconductor device, in which on a semiconductor substrate, semiconductor elements are formed in an element forming area and an alignment mark used in photolithography is formed outside the element forming area, the method comprising the steps of:
forming an element separating insulating film on the upper surface of the semiconductor substrate;
forming a gate multilayer film for forming a gate electrode on the upper surface of the semiconductor substrate, which includes the area where the element separating insulating film is formed;
selectively removing the gate multilayer film in an alignment mark forming area, which is positioned on the element separating insulating film, so that the gate multilayer film remains around the alignment mark forming area;
forming a pattern, made by using a first conductive film, in the element forming area on the upper surface of the semiconductor substrate, and also forming the alignment mark made by using the first conductive film in the alignment mark forming area surrounded by the gate multilayer film;
forming an inter-layer insulating film on the upper surface of the semiconductor substrate after the pattern and the alignment mark are formed;
selectively removing the inter-layer insulating film in the alignment mark forming area, so that the inter-layer insulating film remains on the gate multilayer film around the alignment mark forming area;
removing or thinning the element separating insulating film around the alignment mark;
forming a pattern, made by using a second conductive film, on the inter-layer insulating film by performing alignment of the photolithography by using the alignment mark.
2. The method in accordance with claim 1 , wherein the step of removing or thinning the element separating insulating film around the alignment mark is performed immediately after the selective removal of the inter-layer insulating film in the alignment mark forming area.
3. The method in accordance with claim 1 , wherein the step of selectively removing the gate multilayer film in the alignment mark forming area is performed simultaneously with patterning of the gate multilayer film so as to form the gate electrode.
4. The method in accordance with claim 1 , wherein:
a word wiring line is formed using the gate multilayer film;
a memory cell contact plug, connected to an impurity-diffused layer in the upper surface of the semiconductor substrate, is formed using the pattern made by the first conductive film; and
a bit wiring contact plug, connected to the memory cell contact plug, is formed using the pattern made by the second conductive film.
5. The method in accordance with claim 4 , wherein the step of selectively removing the inter-layer insulating film in the alignment mark forming area is performed simultaneously with formation of a contact hole for connecting the bit wiring contact plug to the memory cell contact plug through the inter-layer insulating film.