Semiconductor device and manufacturing method thereof
View Patent ↗With the objective of enabling a reduction in the size of a final semiconductor device and its thinning, and attaining facilitation of a manufacturing process, the semiconductor device includes a circuit chip having a flat mounted surface, a circuit chip smaller in size than the former circuit chip, and a sheet-like support. The latter circuit chip is formed over a substrate and has a flat back surface fixed to the substrate and a flat surface positioned on the side opposite to the back surface. The support is bonded to the surface of the latter circuit chip and supports the latter circuit chip. Then, the back surface of the latter circuit chip supported by the support is peeled from the substrate and pressed against the mounted surface, thereby fixing the back surface of the latter circuit chip and the mounted surface by an intermolecular bonding force (e.g., hydrogen bonding).
1. A wafer level chip size package type semiconductor device, comprising:
a mounted member;
a circuit forming layer formed on the mounted member;
a planarization layer formed on the circuit forming layer; and
a circuit chip formed on the planarization layer, the circuit chip having a flat back surface fixed to the planarization layer by an intermolecular bonding force, and being smaller in size than the mounted member.
2. The wafer level chip size package type semiconductor device of claim 1 , wherein the circuit chip further includes a thin film mounted thereon, and both the mounted member and the thin film are made from silicon.
3. The wafer level chip size package type semiconductor device of claim 1 , wherein the circuit chip has a front surface and a back surface thereof subject to a planarization or flattening process in the order of a nanomillimeter.
4. The wafer level chip size package type semiconductor device of claim 1 , wherein
the circuit chip is stacked on the planarization layer,
the planarization layer is stacked on the circuit forming layer, and
the circuit forming layer is stacked on the mounted member.
5. The wafer level chip size package type semiconductor device of claim 1 , wherein the circuit chip has nanomillimeter-scale planarized front and back surfaces.