Transmissive disk, manufacturing method thereof, and levitation measurement apparatus using transmissive disk
To provide a transmissive disk which is less subject to damage and whose levitation amount can be measured up to a smaller level with high accuracy, a manufacturing method thereof, and a levitation measurement apparatus using the transmissive disk. A transmissive disk for use in head levitation measurement in the present invention has a first side of a transmissive plate to which AR coating has been applied and a second side thereof to which lubricant coating has been applied.
1 . A transmissive disk for use in head levitation measurement, wherein
the transmissive disk has a first side of a transmissive plate to which AR coating has been applied and a second side thereof to which lubricant coating has been applied.
2 . The transmissive disk according to claim 1 , wherein
the lubricant coating is further applied to the upper surface of the first side to which AR coating has been applied.
3 . The transmissive disk according to claim 1 , wherein
the lubricant is fluorinated lubricant.
4 . The transmissive disk according to claim 1 , wherein
the transmissive plate is formed of a glass plate.
5 . A manufacturing method of a transmissive disk for use in head levitation measurement, comprising:
applying AR coating to a first side of a transmissive plate; and
applying lubricant coating to a second side thereof.
6 . The manufacturing method according to claim 5 , further comprising:
applying AR coating to the first side of the transmissive plate; and
immersing the entire transmissive plate in lubricant.
7 . A levitation measurement apparatus that performs head levitation measurement, comprising:
a transmissive disk;
a projector that is disposed opposite to a first side of the transmissive disk and project light, through the transmissive disk, to a head levitated from a second side of the transmissive disk; and
a measurement section that uses interference between light which is projected from the projector and reflected by the second side of the transmissive disk and light reflected by the head to measure a distance between the head and transmissive disk as a head levitation amount,
the transmissive disk having the first side of a transmissive plate to which AR coating has been applied and second side thereof to which lubricant coating has been applied.
8 . The levitation measurement apparatus according to claim 7 , wherein
the lubricant coating is further applied to the upper surface of the first side of the transmissive plate to which AR coating has been applied.
9 . The levitation measurement apparatus according to claim 7 , wherein
the lubricant is fluorinated lubricant.
10 . The levitation measurement apparatus according to claim 7 , wherein
the transmissive plate is formed of a glass plate.