IP Library Patent Application 11899237
Patent Application
App. No. 11/899,237

Compact Ringlight

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Quick Facts
Patent No.
US None
App. No.
11/899,237
Abstract

A compact ringlight that emulates the performance of a much larger ringlight is disclosed. The invention utilizes a ringlight source and a conical or cylindrical reflector such that light first crosses the optical axis and then is reflected back towards the inspection area. This light is particularly useful for inspecting electronic semiconductor devices.

Claims (26)

1 . A compact ringlight that emulates the performance of a larger ringlight, said compact ringlight comprising:

a) an annular light source that emits light inward towards its axis of symmetry,

b) a reflector which has an annular inner reflecting surface,

c) positioning said annular light source and said reflector such that their axis of symmetry is substantially coincident and such that light from said light source substantially passes through the axis of symmetry prior to being incident on said reflector which then directs the light towards an inspection area.

2 . The compact ringlight of claim 1 which additionally comprises a diffuser to radially diffuse light prior to passing through the axis of symmetry.

3 . The compact ringlight of claim 1 which additionally comprises a baffle that blocks light from directly illuminating the inspection area without first reflecting off of the annular reflector.

4 . The compact ringlight of claim 1 wherein said annular reflecting surface is conical.

5 . The compact ringlight of claim 1 wherein said annular reflecting surface is cylindrical.

6 . The compact ringlight of claim 1 wherein said annular reflecting surface is polygonal.

7 . The compact ringlight of claim 1 wherein said annular light source additionally comprises an annular reflector used to aim light towards said axis of symmetry.

8 . A method for illuminating an object with darkfield lighting, said method comprising:

a) emitting light from a ring and towards the axis of symmetry of said ring,

b) positioning an annular reflective surface such that its axis of symmetry is substantially coincident with the axis of symmetry of said ring, and such that light from said ring is incident on said annular reflective surface after passing through the axis of symmetry of said ring,

c) inhibiting said light from directly striking said object without first reflecting on said annular reflective surface.

9 . The method of claim 8 which additionally comprises radially diffusing said light.

10 . The method of claim 8 wherein said annular reflective surface is conical in shape.

11 . An apparatus for inspecting an electronic semiconductor device with darkfield lighting, said apparatus comprising:

a) a ringlight that emits light towards a center point located on the axis of symmetry of said ringlight,

b) an electronic camera positioned so that its optical axis is substantially coincident with the axis of symmetry of said ringlight,

c) a reflector which has an annular inner reflecting surface,

d) positioning said reflector such that its axis of symmetry is coincident with the axis of symmetry of said ringlight and such that after light from the ringlight passes through said axis it is incident on said reflector which then reflects the light towards said electronic semiconductor device,

e) optical means for preventing light from said ringlight from directly illuminating said electronic semiconductor device without first reflecting off of said reflector.

12 . The apparatus of claim 11 which additionally comprises a diffuser to diffuse light radially with respect to said axis of symmetry.

13 . The apparatus of claim 11 which additionally comprises a baffle that blocks light from directly illuminating the inspection area without first reflecting off of the conical reflector.

14 . The apparatus of claim 11 which additionally comprises a flat plate with a circular aperture, said plate positioned to block light from directly illuminating the inspection area without first reflecting off of the conical reflector.

15 . The apparatus of claim 11 wherein said ringlight of claim 1 wherein said annular inner reflecting surface is substantially paraboloidal.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 14, 2008
From: RVSI INSPECTION, LLC
To: RUDOLPH TECHNOLOGIES, INC.
Reel/Frame 021669/0907 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 15, 2008
From: INTERNATIONAL PRODUCT TECHNOLOGY, INC.
To: SYSTEMATION SEMICONDUCTOR LLC
Reel/Frame 020802/0839 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 11, 2008
From: SHIRES, MARK RICHARD
To: INTERNATIONAL PRODUCT TECHNOLOGY, INC.
Reel/Frame 020788/0179 →