Detector having tuned resistors
View Patent ↗A method of forming a light sensor array includes tuning a resistance level of a plurality of resistors. The resistors are included in a light sensor array for use with a positron emissision tomography (PET) scanner system. The light sensor array includes detection circuits that each includes one of the resistors connected in series with an avalanche photodiode.
1. A method, comprising:
tuning a resistance level of a plurality of resistors,
the resistors being included in a light sensor array for use with a positron emissision tomography (PET) scanner system,
the light sensor array including detection circuits that each includes one of the resistors connected in series with an avalanche photodiode.
2. The method of claim 1 , wherein an electrically resistive material in each of the resistors includes polysilicon.
3. The method of claim 2 , wherein tuning the resistance levels includes tuning a resistance level of the polysilicon.
4. The method of claim 3 , wherein tuning the resistance level of the polysilicon includes applying energy to the polysilicon such that grains in the polysilicon re-organize.
5. The method of claim 3 , wherein tuning the resistance level of the polysilicon includes applying laser energy to the polysilicon.
6. The method of claim 1 , wherein tuning the resistance level includes increasing the resistance level and excludes decreasing the resistance level.
7. The method of claim 1 , wherein the resistance levels are tuned such that each resistor has substantially the same resistance.
8. The method of claim 1 , wherein the resistance levels are tuned such that each resistor has a resistance level in a range of the average of the resistance levels for the resistors +/−1% of the average of the resistance levels for the resistors.
9. The method of claim 1 , wherein the resistance levels are tuned such that each resistor has a resistance level in a range of the average of the resistance levels for the resistors +/−0.5% of the average of the resistance levels for the resistors.
10. The method of claim 1 , wherein each avalanche photodiode includes doped regions, the doped regions including a p-type region contacting an n-type region so as to form a p-n junction.
11. The method of claim 10 , wherein the doped regions include dopants in silicon.
12. The method of claim 11 , wherein the resistors include polysilicon in contact with one of the doped regions.
13. The method of claim 1 , wherein the resistors and the avalanche photodiodes are on a wafer.
14. A positron emissision tomography (PET) scanner system, comprising:
a light sensor array having detection circuits that each includes a resistor connected in series with an avalanche photodiode,
a resistance level of the resistors tuned such that each resistor has a resistance level in a range of an average of the resistance levels for the resistors +/−1% of the average of the resistance levels for the resistors.
15. The system of claim 14 , wherein the resistance level of the resistors is tuned such that each resistor has a resistance level in a range of the average of the resistance levels for the resistors +/−0.5% of the average of the resistance levels for the resistors.
16. The system of claim 14 , wherein each avalanche photodiode includes doped regions, the doped regions including a p-type region contacting an n-type region so as to form a p-n junction.
17. The system of claim 15 , wherein the doped regions include dopants in silicon.
18. The system of claim 17 , wherein the resistors include polysilicon in contact with one of the doped regions.
19. The system of claim 14 , wherein the resistors include polysilicon.
20. The system of claim 14 , wherein the resistors and the avalanche photodiodes are on a wafer.
21. The system of claim 14 , wherein a plurality of the detection circuits are connected in parallel.