Solid-state image pickup device and manufacturing method for the same
View Patent ↗A solid-state image pickup device includes, in a substrate, a plurality of photoelectric conversion regions for subjecting incoming light to photoelectric conversion, a reading gate for reading a signal charge from the photoelectric conversion regions, and a transfer register (vertical register) for transferring the signal charge read by the reading gate. Therein, a groove is formed on the surface side of the substrate, and the transfer register and the reading gate are formed at the bottom part of the groove. With such a structure, in the solid-state image pickup device, reduction can be achieved for the smear characteristics, a reading voltage, noise, and others.
1. A method for manufacturing a solid-state image pickup device that includes: in a substrate, a plurality of a pixel separation regions for partitioning a plurality of pixel regions; a plurality of photoelectric conversion regions for subjecting incoming light to photoelectric conversion; an electrode for reading a signal charge from the photoelectric conversion regions; the method comprising the steps of, after a groove is formed on the substrate:
forming the pixel separation regions, and the electrode at a bottom part of the groove.
2. The method for manufacturing the solid-state image pickup device according to claim 1 , further comprising the step of, after the electrode is formed, forming a light-shielding film to fill a gap between the electrode and a sidewall section of the groove via an inter-layer insulation film.
3. The method for manufacturing the solid-state image pickup device according to claim 1 , wherein the groove has a lattice structure.
4. The method for manufacturing the solid-state image pickup device according to claim 1 , wherein the groove is plurally segmented.
5. The method manufacturing for the solid-state image pickup device according to claim 1 , wherein the groove is formed by directly etching the substrate.
6. The method for manufacturing the solid-state image pickup device according to claim 1 , wherein
after the substrate is subjected to local oxidation to form a local oxidation film, the groove is formed by removing the local oxidation film.