Display methods and apparatus
The invention relates to spatial light modulators for use in display apparatus. In particular, the invention relates to spatial light modulators that include a substrate defining a plane and a shutter suspended over the substrate by a compliant beam. The compliant beam has a cross-sectional thickness, in a dimension parallel to the plane of the substrate, between about 0.2 μm and about 10 μm. In one embodiment, a thickness of the compliant beam in a dimension perpendicular to the plane of the substrate is at least about 1.4 times the cross-sectional width of the compliant beam in the dimension parallel to the plane of the substrate.
1. A spatial light modulator comprising:
a substrate defining a plane; and
a shutter suspended over the substrate by a compliant beam, wherein
a cross-sectional width of the compliant beam in a dimension parallel to the plane of the substrate is between about 0.2 μm and about 10 μm, and
a width of the compliant beam in a dimension perpendicular to the plane of the substrate is at least about 1.4 times the cross-sectional width of the compliant beam in the dimension parallel to the plane of the substrate.
2. The spatial light modulator of claim 1 , wherein the width of the compliant beam in a dimension perpendicular to the plane of the substrate is between about 0.5 μm and about 10 μm.
3. The spatial light modulator of claim 1 , wherein the cross-sectional width of the compliant beam in a dimension parallel to the plane of the substrate is between about 0.2 μm and about 5 μm.
4. The spatial light modulator of claim 1 , wherein the cross-sectional width of the compliant beam in a dimension parallel to the plane of the substrate is between about 0.2 μm and about 1 μm.
5. The spatial light modulator of claim 1 , wherein the compliant beam comprises amorphous silicon.