Membrane for a MEMS condenser microphone
View Patent ↗A membrane ( 2 ) for a microphone ( 1 ) is disclosed which comprises a first portion (A 1 ), a second portion (A 2 ), and elements (E 1 . . . E 4 , E 1 ′ . . . E 4 ′), which connect said first (A 1 ) and said second portion (A 2 ). The second portion (A 2 ) is arranged for a movement in relation to said first portion (A 1 ) around an idle position, which movement includes at least a translatory component in a direction of movement (dm) normal to said membrane ( 2 ). The elements (E 1 . . . E 4 , E 1 ′ . . . E 4 ′) are provided for definition of a spring constant for said movement around said idle position and are arranged substantially along the outer border of said second portion (A 2 ).
1. A membrane for a microphone comprising:
a first portion, a second portion, and elements which connect said first and said second portion;
wherein said second portion is arranged for a movement in relation to said first portion around an idle position, which movement includes at least a translatory component in a direction of movement normal to said membrane;
wherein said elements are arranged substantially along the outer border of said second portion; and
wherein said elements are provided for definition of a spring constant for said movement around said idle position.
2. The membrane as claimed in claim 1 , wherein said elements are additionally provided for a definition of a planar tensile and compression stress within said first portion in said idle position.
3. The membrane as claimed in claim 1 , comprising at least three elements.
4. The membrane as claimed in claim 1 , wherein said elements are spirally arranged.
5. The membrane as claimed in claim 1 , wherein at least one element is symmetrically shaped or wherein at least one element is inversely arranged to the other spirally arranged elements.
6. The membrane as claimed in claim 1 , which consists of a semiconductor, wherein said first portion, said second portion, and said elements exclusively consist of rectangular structures and wherein said structures are in line with a crystal lattice of said semiconductor.
7. The membrane as claimed in claim 1 , wherein said first portion, said second portion, and said elements exist of a flat die of the same material with substantially the same thickness.
8. The membrane as claimed in claim 1 , wherein between said first portion, said second portion, and said elements there are slits, which are provided as a gasket.
9. The membrane as claimed in claim 1 , wherein the maximum amplitude which the membrane is arranged for is less than the thickness of the membrane.
10. Microphone comprising a membrane as claimed in claim 1 .