Protective film structure of metal member, metal component employing protective film structure, and equipment for producing semiconductor or flat-plate display employing protective film structure
View Patent ↗A protective film structure of a metal member for use in an apparatus for manufacturing a semiconductor or the like, the protective film structure including a first coating layer of faultless aluminum oxide formed by direct anodic oxidation of a base-material metal of an aluminum alloy; and a second coating layer formed on the first coating layer and made of yttrium oxide by a plasma spraying method.
1. A protective film structure of a metal member for use in an apparatus for manufacturing a semiconductor or the like, said protective film structure comprising:
a first coating layer of faultless aluminum oxide formed by direct anodic oxidation of a base-material metal of an aluminum alloy; and
a second coating layer formed on the first coating layer and made of yttrium oxide by a plasma spraying method.
2. A protective film structure of a metal member according to claim 1 , wherein a surface of said base-material metal is blasted before forming said first coating layer.
3. A protective film structure of a metal member according to claim 1 , wherein said first coating layer is formed by anodic oxidation using an electrolyte solution in the form of an organic anodization solution of pH 4 to pH 10.
4. A protective film structure of a metal member according to claim 1 , wherein said first coating layer is formed by anodic oxidation using an electrolyte solution in the form of an inorganic anodization solution of pH 4 to pH 10.
5. A protective film structure of a metal member according to any one of claims 1 , 2 , 3 , or 4 , wherein said first coating layer has a thickness of 10 nm or more and 1 micrometer or less.
6. A protective film structure of a metal member according to claim 1 , wherein said second coating layer of yttrium oxide is about 200 micrometers.
7. A gas supply shower head for a semiconductor or flat panel display manufacturing apparatus, using the protective film structure of the metal member according to claim 1 .
8. A metal component for a semiconductor or flat panel display manufacturing apparatus, using the protective film structure of the metal member according to claim 1 .
9. A semiconductor or flat panel display manufacturing apparatus using the protective film structure of the metal member according to claim 1 .
10. A semiconductor or flat panel display manufacturing apparatus using the protective film structure of the metal member according to claim 1 for an inner wall of a process chamber.