Magnetic recording head formed by damascene process
View Patent ↗A method and system for manufacturing a pole for a magnetic recording head. The method and system include providing an insulator and fabricating at least one hard mask on the insulator. The at least one hard mask has an aperture therein. The method and system also include removing a portion of the insulator to form a trench within the insulator. The trench is formed under the aperture. The method and system further include depositing at least one ferromagnetic material. The pole includes a portion of the ferromagnetic material within the trench.
1. A magnetic recording head comprising:
plurality of layers having a trench therein, the plurality of layers including a first buffer layer, an insulator on the first buffer layer, and a second buffer layer on the insulator, each of the plurality of layers having a trench aperture therethrough, the trench aperture for each of the plurality of layers combining to form the trench;
a portion of a hard mask layer on the second buffer layer and having an aperture therein, the portion of the hard mask layer having a top, the aperture residing over the trench; and
a pole residing within the trench, the pole including at least one ferromagnetic layer and having a top, the top of the pole adjacent to the top of the hard mask and at the same height as the top of the hard mask.
2. The magnetic recording head of claim 1 wherein the insulator includes silicon and nitrogen.
3. The magnetic recording head of claim 2 wherein the insulator is silicon oxynitride.
4. The magnetic recording head of claim 1 wherein the hard mask layer includes at least one of Ta, TaN, Ti, TiN, and diamond-like carbon.
5. The magnetic recording head of claim 1 wherein the trench has a plurality of sidewalls, a top, and a bottom, the plurality of sidewalls being nonvertical such that the top is wider than the bottom; and wherein the pole substantially conforms to a shape of the trench.
6. The magnetic recording head of claim 1 wherein the at least one ferromagnetic layer includes at least one of Co Fe, NiFe, and CoNiFe.
7. The magnetic recording head of claim 1 further comprising:
a seed layer between the at least one ferromagnetic layer and the insulator.
8. The magnetic recording head of claim 1 wherein the pole is a perpendicular magnetic recording pole.
9. The magnetic recording head of claim 1 further comprising:
alumina adjacent to the insulator.
10. The magnetic recording head of claim 9 wherein the alumina is a distance of at least one micron from the pole.
11. The magnetic recording head of claim 1 further comprising:
a write gap; and
a shield, the write gap residing between a portion of the shield and the pole.