Methods of fabricating passive element without planarizing and related semiconductor device
View Patent ↗Methods of fabricating a passive element and a semiconductor device including the passive element are disclosed including the use of a dummy passive element. A dummy passive element is a passive element or wire which is added to the chip layout to aid in planarization but is not used in the active circuit. One embodiment of the method includes forming the passive element and a dummy passive element adjacent to the passive element; forming a dielectric layer over the passive element and the dummy passive element, wherein the dielectric layer is substantially planar between the passive element and the dummy passive element; and forming in the dielectric layer an interconnect to the passive element through the dielectric layer and a dummy interconnect portion overlapping at least a portion of the dummy passive element. The methods eliminate the need for planarizing.
1. A semiconductor device comprising:
a passive element in a first dielectric layer;
a dummy passive element in the first dielectric layer adjacent to the passive element; wherein the dummy passive element substantially surrounds the passive element;
a first interconnect to the passive element in the first dielectric layer; and
a second interconnect to structure other than the passive element in the first dielectric layer,
wherein a via of the first interconnect and a via of the second interconnect have substantially the same height.
2. The semiconductor device of claim 1 , further comprising a dummy interconnect portion overlapping at least a portion of the dummy passive element.
3. The semiconductor device of claim 2 , further comprising a second dielectric layer and a third interconnect in the second dielectric layer to the first interconnect.
4. The semiconductor device of claim 3 , further comprising a third and fourth dielectric layer over the second dielectric layer with the fourth dielectric layer including another passive element and another dummy passive element.
5. The semiconductor device of claim 2 , wherein the dummy interconnect portion substantially surrounds the passive element.
6. The semiconductor device of claim 2 , wherein the dummy interconnect portion overlaps the dummy passive element along substantially all of the dummy passive element.
7. The semiconductor device of claim 1 , wherein the dummy passive element is present in substantially all of the first dielectric layer excepting where a via or the passive element exists.
8. The semiconductor device of claim 1 , wherein the passive element is selected from the group consisting of: a thin-film resistor and a metal-insulator-metal capacitor.
9. A method of fabricating a passive element, the method comprising:
forming the passive element and a dummy passive element adjacent to the passive element; wherein the dummy passive element substantially surrounds the passive element;
forming a dielectric layer over the passive element and the dummy passive element including forming a step in the dielectric layer above an outer edge of the dummy passive element;
forming in the dielectric layer an interconnect to the passive element through the dielectric layer and a dummy interconnect portion overlapping at least a portion of the dummy passive element; and
forming another dielectric layer and another interconnect to the interconnect to the passive element without planarizing the dielectric layer.