Methods for manufacturing three-dimensional devices and devices created thereby
View Patent ↗In certain exemplary embodiments of the present invention, three-dimensional micro-mechanical devices and/or micro-structures can be made using a production casting process. As part of this process, an intermediate mold can be made from or derived from a precision stack lamination and used to fabricate the devices and/or structures. Further, the micro-devices and/or micro-structures can be fabricated on planar or nonplanar surfaces through use of a series of production casting processes and intermediate molds. The use of precision stack lamination can allow the fabrication of high aspect ratio structures. Moreover, via certain molding and/or casting materials, molds having cavities with protruding undercuts also can be fabricated. It is emphasized that this abstract is provided to comply with the rules requiring an abstract that will allow a searcher or other reader to quickly ascertain the subject matter of the technical disclosure. This abstract is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims.
1. A method of forming a casting, comprising:
filling a mold having a stacked plurality of lithographically-derived micro-machined metallic foil layers with a first casting material to form a first cast product having an aspect ratio of greater than 10:1, the stacked plurality of lithographically-derived micro-machined metallic foil layers defining a sandwiched cavity, said stacked plurality of lithographically-derived micro-machined metallic foil layers defining a protruding undercut; and
demolding the first cast product from the mold, the first cast product reflecting the sandwiched cavity said first cast product comprising a plurality of product surfaces that define a periphery of a layer-less volume of said first cast product, a product surface from said plurality of product surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a mold surface formed by said stacked plurality of metallic foil layers.
2. A method of forming a casting, comprising:
filling a mold having a stacked plurality of lithographically-derived micro-machined metallic foil layers with a first casting material to form a first cast product, the stacked plurality of lithographically-derived micro-machined metallic foil layers defining a feature having an aspect ratio greater than 25:1, said stacked plurality of lithographically-derived micro-machined metallic foil layers defining a protruding undercut; and
demolding the first cast product from the mold, the first cast product reflecting the feature said first cast product comprising a plurality of product surfaces that define a periphery of a layer-less volume of said first cast product, a product surface from said plurality of product surfaces comprising a plurality of 3-dimensional micro-features that substantially spatially invertedly replicate a mold surface formed by said stacked plurality of metallic foil layers.
3. The method of claim 2 , wherein:
the feature is an isotropic wall.
4. The method of claim 2 , wherein:
the feature is a sub-cavity.
5. The method of claim 2 , wherein:
the feature is a sub-cavity in fluid communication with an outer edge of a layer of the mold.
6. A method of forming a plurality of castings, comprising:
repetitively:
filling a mold having a stacked plurality of micro-machined foil layers with a first casting material to form a first cast product having an aspect ratio of greater than 10:1, the stacked plurality of micro-machined foil layers defining a protruding undercut; and
demolding the first cast product from the mold without damage to either the first cast product or the mold.
7. The method of claim 6 , wherein:
the first cast product reflects the protruding undercut.
8. The method of claim 6 , wherein:
the micro-machined layers are lithographically-derived.
9. The method of claim 6 , wherein:
the micro-machined layers are non-lithographically-derived.
10. The method of claim 6 , wherein:
the micro-machined layers are formed via laser machining.
11. The method of claim 6 , wherein:
the micro-machined layers are formed via ion etching.
12. The method of claim 6 , wherein:
the micro-machined layers are formed via electroplating.
13. The method of claim 6 , wherein:
the micro-machined layers are formed via vapor deposition.
14. The method of claim 6 , wherein:
the micro-machined layers are formed via bulk micro-machining.
15. The method of claim 6 , wherein:
the micro-machined layers are formed via surface micro-machining.
16. The method of claim 6 , wherein:
the micro-machined layers are formed via conventional machining.
17. The method of claim 6 , wherein:
the mold is reusable.
18. The method of claim 6 , wherein:
the first cast product is demolded from the mold such that the mold is not substantially damaged.
19. A method of forming a casting, comprising:
without damage to either the first cast product or the mold, demolding a first cast product from a mold having a stacked plurality of lithographically-derived micro-machined metallic foil layers that define a feature having an aspect ratio greater than 25:1, the first cast product reflecting the feature, the stacked plurality of lithographically-derived micro-machined metallic foil layers defining a protruding undercut.
20. A method of forming a casting, comprising:
without damage to either the first cast product or the mold, demolding a first cast product from a mold having a stacked plurality of micro-machined foil layers that define a protruding undercut and a feature having an aspect ratio of greater than 10:1, the first case product reflecting the protruding undercut and the feature.