Systems and methods for nanowire growth
View Patent ↗The present invention is directed to systems and methods for nanowire growth. In an embodiment, methods for nanowire growth and doping are provided, including methods for epitaxial vertically oriented nanowire growth including providing a substrate material having one or more nucleating particles deposited thereon in a reaction chamber, introducing an etchant gas into the reaction chamber at a first temperature which gas aids in cleaning the surface of the substrate material, contacting the nucleating particles with at least a first precursor gas to initiate nanowire growth, and heating the alloy droplet to a second temperature, whereby nanowires are grown at the site of the nucleating particles. The etchant gas may also be introduced into the reaction chamber during growth of the wires to provide nanowires with low taper.
1. A method for axially doping one or more desired portions of a nanowire along a length of the nanowire during growth of said nanowire comprising:
(a) providing a substrate material having one or more nucleating particles deposited thereon in a reaction chamber;
(b) pre-cleaning the surface of the substrate material and the nucleating particles by introducing a pre-cleaning etchant gas into the reaction chamber;
(c) after the pre-cleaning of step (b), contacting the nucleating particles with at least one precursor gas to initiate nanowire growth;
(d) introducing at least one dopant gas into the reaction chamber during said nanowire growth to dope said one or more desired portions of the nanowire; and
(e) during and/or prior to said dopant introduction, introducing a non-precursor etchant gas into the reaction chamber at a certain pressure, wherein the etchant gas at the certain pressure is capable of substantially minimizing uncatalysed growth resulting from the at least one precursor gas on a sidewall of the nanowire during said nanowire growth and hindering incorporation of the at least one dopant on a sidewall of the nanowire.
2. The method of claim 1 , wherein the pre-cleaning etchant gas comprises hydrogen chloride (HCl).
3. A method for axially doping one or more desired portions of a nanowire along a length of the nanowire during growth of said nanowire comprising:
(a) providing a substrate material having one or more nucleating particles deposited thereon in a reaction chamber;
(b) contacting the nucleating particles with at least one precursor gas to initiate nanowire growth;
(c) introducing at least one dopant gas into the reaction chamber during said nanowire growth to dope said one or more desired portions of the nanowire;
(d) during and/or prior to said dopant introduction, introducing a non-precursor etchant gas into the reaction chamber at a certain pressure, wherein the etchant gas at the certain pressure is capable of substantially minimizing uncatalysed growth resulting from the at least one precursor gas on a sidewall of the nanowire during said nanowire growth and hindering incorporation of the at least one dopant on a sidewall of the nanowire; and
(e) controlling the amount of said introduced non-precursor etchant gas to aid in axial dopant modulation of the nanowire.
4. The method of claim 3 , wherein the non-precursor etchant gas comprises hydrogen chloride (HCl).
5. A method for axial doping modulation of a nanowire during growth of said nanowire comprising:
(a) providing a substrate material having one or more nucleating particles deposited thereon in a reaction chamber;
(b) contacting the nucleating particles with at least one precursor gas to initiate nanowire growth;
(c) intermittently introducing at least one dopant as into the reaction chamber during said nanowire growth to axially modulate the nanowire doping; and
(d) introducing a non-precursor etchant gas into the reaction chamber during step (c), wherein the etchant gas is capable of hindering incorporation of the at least one dopant on a sidewall of the nanowire, wherein the non-precursor etchant gas is introduced at a relatively low pressure compared to the pressure of the at least one precursor gas.
6. A method for axial doping modulation of a nanowire during growth of said nanowire comprising:
(a) providing a substrate material having one or more nucleating particles deposited thereon in a reaction chamber;
(b) contacting the nucleating particles with at least one precursor gas to initiate nanowire growth;
(c) intermittently introducing at least one dopant gas into the reaction chamber during said nanowire growth to modulate the nanowire doping;
(d) introducing a non-precursor etchant, gas into the reaction chamber during step (c), wherein the etchant gas is capable of hindering incorporation of the at least one dopant on a sidewall of the nanowire; and
(e) controlling the amount of the etchant gas introduced in step (d) depending on the dopant gas to hinder incorporation of the dopant on a sidewall of the nanowire during said axial modulation of the nanowire doping.