Manufacture of semiconductor device
View Patent ↗A reflectance-controlling layer whose reflectance to irradiation of laser light becomes lower as a thickness thereof becomes thinner is formed on a semiconductor substrate having a first region and a second region. Thereafter, the reflectance-controlling layer on the first region is etched. Then, a laser light is irradiated to the semiconductor substrate to anneal an n − -type semiconductor region and an n + -type semiconductor region of the first region. In the same manner, after the reflectance-controlling layer is formed on the semiconductor substrate, the reflectance-controlling layer on the second region is etched. Then, a laser light is irradiated to the semiconductor substrate to anneal a p − -type semiconductor region and a p + -type semiconductor region of the second region.
1. A method of manufacturing a semiconductor device, comprising the steps of:
(a) forming a reflectance-controlling layer whose reflectance to irradiation of light from a light source becomes lower as a thickness thereof becomes thinner on a semiconductor substrate including a first region and a second region;
(b) etching the reflectance-controlling layer on the first region; and
(c) after the step (b), annealing the first region by irradiating the light to the semiconductor substrate,
wherein, before the step (a), a bipolar transistor is formed on the second region, and
after the step (b), a MISFET is formed on the first region.
2. A method of manufacturing a semiconductor device, comprising the steps of:
(a) forming a reflectance-controlling layer whose reflectance to irradiation of light from a light source becomes lower as a thickness thereof becomes thinner on a semiconductor substrate including a first region and a second region;
(b) etching the reflectance-controlling layer on the first region; and
(c) after the step (b), annealing the first region by irradiating the light to the semiconductor substrate,
wherein, before the step (a), a memory cell is formed on the second region, and
after the step (b), a MISFET is formed on the first region.