Thin film transistor array panel and method for manufacturing the same
View Patent ↗The present invention provides a TFT array panel and a manufacturing method of the same, which has signal lines including a lower layer of an Al containing metal and an upper layer of a molybdenum alloy (Mo-alloy) comprising molybdenum (Mo) and at least one of niobium (Nb), vanadium (V), and titanium (Ti). Accordingly, undercut, overhang, and mouse bites which may arise in an etching process, are prevented, and TFT array panels that have signal lines having low resistivity and good contact characteristics are provided.
1. A manufacturing method of a thin film transistor array panel, comprising:
forming a gate line on an insulating substrate, the gate line having a first layer of an Al containing metal and a second layer of a Mo-alloy comprising molybdenum (Mo) and at least one of niobium (Nb), vanadium (V), and titanium (Ti), the gate line having a gate electrode, wherein the first layer and the second layer are patterned by using a single etchant;
depositing a gate insulating layer, a semiconductor layer, and a ohmic contact layer on the gate line in sequence;
patterning the semiconductor layer and the ohmic contact layer;
forming a drain electrode and a data line having a source electrode on the gate insulating layer and the ohmic contact layer, the drain electrode facing the source electrode with a predetermined gap;
forming a passivation layer having a contact hole exposing the drain electrode on the data line and the drain electrode; and
forming a pixel electrode connected to the drain electrode through the contact hole on the passivation layer.
2. The method of claim 1 , wherein at least one of the gate line and the data line is patterned by using an etchant including phosphoric acid, nitric acid, and acetic acid.
3. The method of claim 1 , wherein the data line and the semiconductor layer are formed by a photo-etching process using a photoresist pattern having a first portion, a second portion that is thicker than the first portion, and a third portion that is thinner than the first portion.
4. The method of claim 3 wherein the first portion is disposed between the source electrode and the drain electrode, and the second portion is disposed on the data line and the drain electrode.
5. The method of claim 1 , further comprising:
forming at least one color filter before forming the passivation layer.
6. A manufacturing method of a thin film transistor array panel, comprising:
forming a gate line on an insulating substrate;
depositing a gate insulating layer, a semiconductor layer, and a ohmic contact layer on the gate line in sequence;
patterning the semiconductor layer and the ohmic contact layer;
forming a drain electrode and a data line having a source electrode on the gate insulating layer and the ohmic contact layer, the data line and the drain electrode having a first layer of a Mo containing metal, a second layer of an Al containing metal, and a third layer of a Mo containing metal, at least one of the first and third layers comprising a Mo-alloy including molybdenum (Mo) and at least one of niobium (Nb), vanadium (V), and titanium (Ti);
forming a passivation layer having a contact hole exposing the drain electrode on the data line and the drain electrode; and
forming a pixel electrode connected to the drain electrode through the contact hole on the passivation layer.
7. The method of claim 6 , wherein at least one of the gate line and the data line is patterned by using an etchant including phosphoric acid, nitric acid, and acetic acid.
8. The method of claim 6 , wherein the data line and the semiconductor layer are formed by a photo-etching using a photoresist pattern having a first portion, a second portion that is thicker than the first portion, and a third portion that is thinner than the first portion.
9. The method of claim 8 , wherein the first portion is disposed between the source electrode and the drain electrode, and the second portion is disposed on the data line and the drain electrode.
10. The method of claim 6 , further comprising:
forming at least one color filter before forming the passivation layer.
11. The method of claim 6 , wherein the first layer, the second layer and the third layer and patterned by using a single etchant.
12. The method of claim 1 , wherein the data line and the drain electrode have a fourth layer of a Mo containing metal, a fifth layer of an Al containing metal, and a sixth layer of a Mo containing metal, at least one of the fourth and sixth layers comprising a Mo-alloy including molybdenum (Mo) and at least one of niobium (Nb), vanadium (V), and titanium (Ti).