Method for manufacturing a perpendicular magnetic write head with wrap around magnetic trailing and side shields
View Patent ↗A method for manufacturing a magnetic write head having a wrap around magnetic shield. The method allows a highly accurate short wavelength such as 193 mm photolithography to be used to accurately define the placement and critical dimension of wrap around magnetic shield. The method includes the formation of a magnetic write pole, top gap, and side gap and the deposition of a RIEable fill layer thereover, and CMP to planarization. A 193 nm photolithography and ion milling is used to form a mask over the RIEable layer and one or more reactive ion etching processes are performed to pattern the RIEable layer through 193 nm photolithography mask. A wrap around shield can then be electroplated into the opening formed in the RIEable layer.
1. A method for manufacturing a magnetic write head for perpendicular magnetic recording, comprising:
providing a substrate;
forming a magnetic write pole layer over the substrate, the write pole layer having a first mask structure formed thereover, the first mask structure including a hard mask layer directly on top of the magnetic write pole layer;
conformally depositing a non-magnetic material;
performing a directional material removal process to define a top gap and a side gap;
depositing a RIEable refill layer;
performing a first chemical mechanical polishing process;
forming a RIE mask structure using short wavelength photolithography, the RIE mask structure having an opening configured to define a wrap around shield;
performing a first reactive ion etching to remove portions of the RIEable refill layer that are not protected by the RIE mask structure; and
electroplating a magnetic material to form the wrap-around shield.
2. The method as in claim 1 wherein the directional material removal process comprises ion milling.
3. The method as in claim 1 wherein the directional material removal process comprises a chemical mechanical polishing (CMP) process.
4. The method as in claim 1 wherein the RIEable refill layer comprises a material selected from the group consisting of SiO 2 , SIN, SiC and Tao.
5. The method as in claim 1 wherein the RIE mask layer comprises NiFe, Rh, Pt, Ru.
6. The method as in claim 1 wherein the hard mask layer comprises alumina.
7. The method as in claim 1 wherein the reactive ion etching is performed in an atmosphere comprising a material selected from the group consisting of CF 4 , CHF 3 , BCl 3 , SF 6 , Ar, O 2 and N 2 .
8. The method as in claim 1 wherein the magnetic write pole layer has first and second laterally opposed sides, the directional material removal process comprises ion milling and is performed sufficiently to form first and second non-magnetic side gap layers at first and the first and second sides of the write pole.
9. The method as in claim 1 further comprising, after depositing the magnetic material to form the wrap around magnetic shield:
performing a reactive ion etching to remove at least a portion of the remaining refill layer;
depositing an alumina fill layer; and
performing a second chemical mechanical polishing process.
10. The method as in claim 1 the further comprising a step of forming a second mask structure that comprises performing a 193 nm photolithography to pattern a photoresist layer.