Fenceless main pole definition for advanced perpendicular magnetic write head
View Patent ↗A method for manufacturing a magnetic write head for perpendicular magnetic recording. The method includes forming a write pole using a mask that includes a hard mask layer deposited over the write pole laminate material, and a thick, physically robust image transfer layer. The image transfer layer can be a material such as AlTiO that can be patterned by a reactive ion etching process, but which also resists deformation during processing. This process allows a write pole and wrap-around trailing shield to be constructed at very narrow track widths without the mask deformation and fencing problems experienced by prior art methods.
1. A method for manufacturing a magnetic write head for use in a perpendicular magnetic recording system, the method comprising:
providing a substrate;
depositing a magnetic write pole material over the substrate;
depositing a hard mask layer over the magnetic write pole material;
depositing a physically robust image transfer layer comprising AlTiO over the hard mask layer;
forming a photoresist mask over the physically robust image transfer layer;
performing a reactive ion etching (RIE) to transfer the image of the photoresist mask onto the physically robust image transfer layer and the hard mask layer; and
performing an ion milling to remove portions of the magnetic write pole material layer that are not protected by the image transfer layer and hard mask layer.
2. A method for manufacturing a magnetic write head for use in a perpendicular magnetic recording system, the method comprising:
providing a substrate;
depositing a magnetic write pole material over the substrate;
depositing a hard mask layer over the magnetic write pole material;
depositing a physically robust image transfer layer comprising AlTiO over the hard mask layer;
forming a photoresist mask over the physically robust image transfer layer;
performing a reactive ion etching (RIE) to transfer the image of the photoresist mask onto the physically robust image transfer layer and the hard mask layer; and
performing an ion milling to remove portions of the magnetic write pole material layer that are not protected by the image transfer layer and hard mask layer wherein the physically robust image transfer layer has a thickness of 100 to 700 nm.
3. A method for manufacturing a magnetic write head for use in a perpendicular magnetic recording system, the method comprising:
providing a substrate;
depositing a magnetic write pole material over the substrate;
depositing a hard mask layer over the magnetic write pole material;
depositing a physically robust image transfer layer constructed of a material that can be removed by reactive ion etching over the hard mask layer;
forming a photoresist mask over the physically robust image transfer layer;
performing a reactive ion etching (RIE) to transfer the image of the photoresist mask onto the physically robust image transfer layer and the hard mask layer; and
performing an ion milling to remove portions of the magnetic write pole material layer that are not protected by the image transfer layer and hard mask layer wherein the physically robust image transfer layer comprises AlTiO having a thickness of 100-700 nm.
4. A method for manufacturing a magnetic write head for use in a perpendicular magnetic recording system, the method comprising:
providing a substrate;
depositing a magnetic write pole material over the substrate;
depositing a hard mask layer over the magnetic write pole material;
depositing a physically robust image transfer layer comprising AlTiO over the hard mask layer;
forming a photoresist mask over the physically robust image transfer layer;
performing a reactive ion etching (RIE) to transfer the image of the photoresist mask onto the physically robust image transfer layer and the hard mask layer; and
performing an ion milling to remove portions of the magnetic write pole material layer that are not protected by the image transfer layer and hard mask layer wherein the hard mask layer comprises alumina.
5. A method for manufacturing a magnetic write head for use in a perpendicular magnetic recording system, the method comprising:
providing a substrate;
depositing a magnetic write pole material over the substrate;
depositing a hard mask layer over the magnetic write pole material;
depositing a physically robust image transfer layer comprising AlTiO over the hard mask layer;
forming a photoresist mask over the physically robust image transfer layer;
performing a reactive ion etching (RIE) to transfer the image of the photoresist mask onto the physically robust image transfer layer and the hard mask layer; and
performing an ion milling to remove portions of the magnetic write pole material layer that are not protected by the image transfer layer and hard mask layer wherein the hard mask layer is a bi-layer structure comprising a first layer comprising alumina and a second layer comprising a material that can be removed by reactive ion etching, the second layer being located between the first layer and the physically robust image transfer layer.
6. A method for manufacturing a magnetic write head for use in a perpendicular magnetic recording system, the method comprising:
providing a substrate;
depositing a magnetic write pole material over the substrate;
depositing first hard mask layer over the magnetic write pole material;
depositing a physically robust image transfer layer comprising AlTiO over the hard mask layer;
forming a photoresist mask over the physically robust image transfer layer;
performing a reactive ion etching (RIE) to transfer the image of the photoresist mask onto the physically robust image transfer layer and the hard mask layer; and
performing an ion milling to remove portions of the magnetic write pole material layer that are not protected by the image transfer layer and hard mask layer; and further comprising depositing a second hard mask layer, constructed of a material that can be removed by reactive ion etching, between the physically robust image transfer layer and the photoresist layer.
7. A method as in claim 5 wherein the first hard mask layer comprises SiN or SiO 2 .
8. A method as in claim 6 wherein the second hard mask layer comprises Co or Cr.
9. A method for manufacturing a magnetic write head for use in a perpendicular magnetic recording system, the method comprising:
providing a substrate;
depositing a magnetic write pole material over the substrate;
depositing a hard mask layer over the magnetic write pole material;
depositing a physically robust image transfer layer comprising AlTiO over the hard mask layer;
forming a photoresist mask over the physically robust image transfer layer;
performing a reactive ion etching (RIE) to transfer the image of the photoresist mask onto the physically robust image transfer layer and the hard mask layer; and
performing an ion milling to remove portions of the magnetic write pole material layer that are not protected by the image transfer layer and hard mask layer;
wherein the hard mask layer is an alumina hard mask layer, and wherein the method further comprises depositing a first hard mask layer between the alumina hard mask layer and the physically robust image transfer layer and depositing a second hard mask layer between the physically robust, image transfer layer and the photoresist layer.
10. A method as in claim 9 wherein the first hard mask layer comprises SiN.
11. A method as in claim 9 wherein the second hard mask layer comprises Cr or Co.
12. A method as in claim 9 wherein the first hard mask layer comprises SiN and the second hard mask layer comprises Co or Cr.
13. A method for manufacturing a magnetic write head for use in a perpendicular magnetic recording system, the method comprising:
providing a substrate;
depositing a magnetic write pole material over the substrate;
depositing a first hard mask layer over the magnetic write pole material;
depositing a second hard mask layer, constructed of a material that can be removed by reactive ion etching, over the first hard mask layer;
depositing a physically robust image transfer layer, comprising AlTiO, over the second hard mask layer;
forming a photoresist mask over the physically robust image transfer layer;
performing a first reactive ion etching (RIE) to transfer the image of the photoresist mask onto the physically robust image transfer layer;
performing a first ion milling to remove portions of the hard mask layer and magnetic write pole material layer that are not protected by the image transfer layer
conformally depositing a non-magnetic side gap material;
performing a second ion milling to remove portions of the non-magnetic side gap material, the ion milling being performed sufficiently to expose the second hard mask layer;
performing a second reactive ion etching to remove the second hard mask layer; and
depositing a magnetic material to form a magnetic shield.
14. A method as in claim 13 wherein the physically robust, image transfer layer has a thickness of 100 to 700 nm.
15. A method as in claim 13 wherein the second hard mask layer comprises SiN.
16. A method as in claim 13 wherein second ion milling is performed in a chemistry that contains Ar.
17. A method as in claim 13 further comprising depositing a second hard mask layer, constructed of a material that can be removed by reactive ion etching, over the physically robust, image transfer layer.
18. A method for manufacturing a magnetic write head for perpendicular magnetic recording, the method comprising:
providing a substrate;
depositing a magnetic write pole material over the substrate;
depositing an alumina hard mask layer over the magnetic write pole material, the alumina hard mask being a first hard mask;
depositing a SiN mask layer over the alumina first hard mask layer;
depositing an AlTiO image transfer layer over the SiN mask layer;
depositing a second hard mask layer comprising a material that can be removed by reactive ion etching over the AlTiO image transfer layer;
forming a photoresist mask over the second hard mask layer;
performing a first reactive ion etching to transfer the image of the photoresist mask onto the second hard mask;
performing a second reactive ion etching to transfer the image of the second hard mask onto the image transfer layer and the SiN mask layer;
performing a first ion milling to form a write pole;
conformally depositing an alumina side gap material layer;
performing a second ion milling in an Ar chemistry to remove a portion of the alumina side gap material layer and to expose the SiN mask layer;
performing a third reactive ion etching to remove the SiN mask layer; and
depositing a magnetic material to form a trailing magnetic shield.
19. A method as in claim 18 wherein the first and second reactive ion etchings are performed in a chlorine chemistry.