Fabrication method for polycrystalline silicon thin film and apparatus using the same
View Patent ↗The present invention relates to a fabrication method for polycrystalline silicon thin film in which amorphous silicon is crystallized by laser using a mask having a mixed structure of laser transmission pattern group and laser non-transmission pattern group, wherein the mask comprises two or more of dot pattern groups in which the non-transmission pattern group is perpendicular to a scan directional axis, and the dot pattern groups are formed in a certain shape and comprise first non-transmission patterns that are not respectively arranged in a row in an axis direction perpendicular to the scan directional axis, and second non-transmission patterns that are formed in the same arrangement as the first non-transmission patterns, but are positioned in such a manner that the second non-transmission patterns are parallel to the first non-transmission patterns and vertical axis of the scan directional axis.
1. A display device, comprising:
a polycrystalline silicon thin film, wherein the polycrystalline silicon thin film comprises regions of polycrystalline silicon separated by overlapping dot-shaped regions of amorphous silicon, and is fabricated by process of:
using a mask having a laser transmission pattern group and a laser non-transmission pattern group; and
moving the mask, after laser irradiation, a certain distance,
wherein the laser non-transmission pattern group comprises two or more dot pattern groups formed perpendicular to a scan directional axis, and
wherein the dot pattern groups comprise:
first non-transmission patterns that are not arranged in a line in an axis direction perpendicular to the scan directional axis, and
second non-transmission patterns that are formed in a same arrangement as the first non-transmission patterns, but are positioned so that the second non-transmission patterns are parallel to an axis perpendicular to the first non-transmission patterns and the scan directional axis.
2. The display device according to claim 1 , wherein the display device is an organic electroluminescent device or a liquid crystal display device.