Method of fabricating an apparatus of fabricating an flat panel display device and method for fabricating flat panel display device
View Patent ↗A method of fabricating an apparatus of fabricating a flat panel display device and method of fabricating flat panel display device is disclosed, which enables simplification of process by performing a patterning process without a photo process, the method for fabricating an apparatus of fabricating flat panel display device comprising, preparing a master mold including a thin film pattern, coating a liquid-type molding material including oligomer on the master mold, forming a soft mold including a groove provided with a pattern in a shape corresponding to the thin film pattern of the master mold and adhering the soft mold to a mold support plate, wherein the soft mold is adhered to the mold support plate by a covalent bonding in the interface between the oligomer and the mold support plate.
1. A method for fabricating an apparatus of fabricating flat panel display device comprising:
preparing a master mold including a thin film pattern;
coating a liquid-type molding material including oligomer on the master mold;
forming a soft mold including a groove provided with a pattern in a shape corresponding to the thin film pattern of the master mold;
placing a mold support plate on the soft mold; and
heat-treating the soft mold and the mold support plate to cause a covalent bonding in the interface between the oligomer in the soft mold and the mold support plate such that the soft mold is bonded to the mold support plate without using an adhesive,
wherein the oligomer includes monomers [SiO(CH 3 ) 2 ] polymerized linearly, and a terminal group of Si—H; and
wherein the covalent bonding occurs between hydroxyl radical (OH) and H(hydrogen) at the terminal group of oligomer, or between H(hydrogen) of hydroxyl radical (OH) and H(hydrogen) at the terminal group of oligomer.
2. The method of claim 1 , wherein the soft mold is comprised of a base part which includes monomers [SiO(CH 3 ) 2 ] linked linearly and a terminal having a vinyl-group bonded thereto; an X-linker part which includes monomers [SiO(CH 3 ) 2 ] linked linearly, and some of the monomers have hydrogen(H) bonded thereto; and a material mixed with the oligomer.
3. The method of claim 1 , wherein a heat treatment of 80° C. to 100° C. is applied for 5 minutes to 20 minutes in state of that the soft mold is brought into contact with the mold support plate.
4. A method of fabricating a flat panel display device using method for fabricating an apparatus provided with preparing a master mold including a thin film pattern, coating a liquid-type molding material including oligomer on the master mold, forming a soft mold including a groove provided with a pattern in a shape corresponding to the thin film pattern of the master mold, and adhering the soft mold to a mold support plate, comprising:
coating an etch-resist liquid on a substrate including a thin film;
positioning the soft mold above the substrate coated with the etch-resist liquid, and patterning an etch-resist layer by using the soft mold;
patterning the thin film by using the patterned etch-resist layer;
removing the etch-resist layer; and
wherein the oligomer includes monomers [SiO(CH 3 ) 2 ] polymerized linearly, and a terminal group of Si—H, and wherein adhering the soft mold to the mold support plate comprises heat-treating the soft mold and the mold support plate to cause a covalent bonding in the interface between the oligomer in the soft mold and the mold support plate such that the soft mold is directly bonded to the mold support plate without using an adhesive, wherein the covalent bonding occurs between hydroxyl radical (OH) and H(hydrogen) at the terminal group of oligomer, or between H(hydrogen) of hydroxyl radical (OH) and H(hydrogen) at the terminal group of oligomer.