Target for vaporizing under an electron beam, a method of fabricating it, a thermal barrier and a coating obtained from a target, and a mechanical part including such a coating
View Patent ↗The invention relates to a composite target in the form of a bar made of ceramic powders and designed to be evaporated under an electron beam, the target comprising zirconia and at least one zirconia stabilizer. In characteristic manner, said target is wherein said zirconia stabilizer is at a molar content lying in the range 2% to 30% and wherein said zirconia is formed by more than 90% of a monoclinic phase. The invention is applicable to fabricating a ceramic thermal barrier of low thermal conductivity and high thermomechanical strength formed by evaporation under an electron beam.
1. A method of fabricating a composite target in the form of a bar, the target being made of ceramic powders and being intended for being evaporated under an electron beam, comprising:
a) preparing at least a first mixture having a first composition from a binder and a powder comprising zirconia and at least one zirconia stabilizer;
b) introducing said mixture into a mold;
c) compacting the mixture in said mold; and
d) baking the compacted mixture at a temperature of less than 1500° C.,
wherein the at least one zirconia stabilizer is included at a molar content of 2% to 30%, and
wherein, after the baking the compacted mixture, the zirconia in the compacted mixture contains more than 90% of a monoclinic phase.
2. A fabrication method according to claim 1 , wherein the stabilizer comprises at least one element belonging to the group formed by rare earth oxides, tantalum oxide, and niobium oxide.
3. A fabrication method according to claim 1 , wherein step a) includes preparing at least one second mixture having a second composition from a binder and a powder comprising zirconia and at least one zirconia stabilizer, said zirconia being formed by more than 90% of a monoclinic phase, and wherein step b) comprises introducing the first mixture and the second mixture in succession, thereby obtaining a target having a composition in zirconia and stabilizer that varies along the height of the target.
4. A fabrication method according to claim 1 , wherein said ceramic powders present a mean particle diameter lying in the range 5 μm to 30 μm.
5. A fabrication method according to claim 1 , wherein said ceramic powders present a mean particle diameter of less than 5 μm, and wherein step a) includes a substep of calcining the powder prior to incorporating the binder.