Scanning system for a probe storage device
View Patent ↗A probe storage device includes a scanner chip body having at least a mechanical ground portion provided with first and second opposing surfaces and a scan table suspension portion. A scan table including a top surface and a back surface is moveably mounted to the scan table suspension portion. A probe array chip is fixedly mounted to the first surface of the mechanical ground portion. A first plate is also fixedly mounted to the first surface of the mechanical ground portion. A second plate, having a main body portion including first and second opposing surfaces, is fixedly mounted to the second surface of the mechanical ground portion. A desiccant layer is positioned upon one of the first surface of the second plate, the back surface of the scan table and one of the first and second surfaces of the mechanical ground portion.
1. A probe storage device comprising:
a scanner chip body including at least a mechanical ground portion having first and second opposing planar surfaces, a scan table suspension portion and, first and second coil mounting cavities;
a scan table moveably mounted to the scan table suspension portion, the scan table including a top surface and a back surface;
a first coil mounted in the first coil mounting cavity;
a second coil mounted in the second coil mounting cavity;
a probe array chip fixedly mounted to the first surface of the mechanical ground portion;
a first plate having main body section including first and second opposing surfaces, the second surface being fixedly mounted to the first surface of the mechanical ground portion;
a second plate having a main body portion including first and second opposing surfaces, the first surface being fixedly mounted to the second surface of the mechanical ground portion; and
a desiccant layer positioned upon at least one of the first surface of the second plate, the back surface of the scan table and one of the first and second surfaces of the mechanical ground portion, wherein the desiccant layer is configured to absorb any moisture present in the probe storage device.
2. The probe storage device according to claim 1 , wherein the desiccant layer is applied to the first surface of the second plate.
3. The probe storage device according to claim 2 , wherein the second plate includes a plurality of pockets, the desiccant layer being positioned in each of the plurality of pockets.
4. The probe storage device according to claim 1 , wherein the desiccant layer is deposited on the back surface of the scan table.
5. The probe storage device according to claim 1 , wherein the desiccant layer is formed from one of a calcium sulfate, a silicon gel, a calcium aluminosilicate clay, activated aluminum, and a molecular sieve.