Method for providing a perpendicular magnetic recording (PMR) transducer

1. A method for providing a perpendicular magnetic recording (PMR) transducer including a PMR pole and a yoke structure coupled with the PMR pole, the method comprising;

providing a hard mask, a first portion of the hard mask residing on the PMR pole, a second portion of the hard mask residing on an other structure;

providing an intermediate layer, the intermediate layer surrounding at least the PMR pole;

performing a planarization on at least the intermediate layer to remove the first portion of the hard mask residing on the PMR pole without completely removing the second portion of the hard mask on the other structure;

removing a remaining portion of the hard mask on the other structure, the removing the remaining portion of the hard mask further comprising performing an ion mill;

providing a write gap on the PMR pole; and

providing a shield on the write gap.

2. The method of claim 1 wherein the other structure includes the yoke structure.

3. The method of claim 1 wherein the other structure includes an anchor structure.

4. The method of claim 1 wherein the shield includes a notch having a height, the notch residing substantially above the PMR pole and wherein the planarization removes a portion of the intermediate layer having a thickness based on the height of the notch.

5. The method of claim 1 further comprising:

providing a planarization stop layer, at least a portion of the planarization stop layer residing on the PMR pole and under the first portion of the hard mask.

6. The method of claim 5 further comprising:

removing the at least the portion of the planarization stop layer after the planarization has been performed.

7. The method of claim 3 wherein the planarization stop layer includes diamond-like carbon.

8. The method of claim 1 further comprising:

providing a planarization stop layer, at least a portion of the planarization stop layer residing on the PMR pole and under the first portion of the hard mask; and

removing a remaining portion of the planarization stop layer after the remaining portion of the hard mask is removed.

9. A method for providing a perpendicular magnetic recording (PMR) transducer including a PMR pole and a yoke structure coupled with the PMR pole, the method comprising;

providing a hard mask, a first portion of the hard mask residing on the PMR pole, a second portion of the hard mask residing on an other structure;

providing an intermediate layer, the intermediate layer surrounding at least the PMR pole;

performing a planarization on at least the intermediate layer to remove the first portion of the hard mask residing on the PMR pole without completely removing the second portion of the hard mask on the other structure;

removing a remaining portion of the hard mask on the other structure, wherein the shield includes a notch having a height, the notch residing substantially above the PMR pole, the removing the remaining portion of the hard mask further comprising performing an ion mill having a duration based on the height, the ion mill removing the remaining portion of the hard mask and a portion of the intermediate layer;

providing a write gap on the PMR pole; and

providing a shield on the write gap.

10. A method for providing a perpendicular magnetic recording (PMR) transducer including a PMR pole and a yoke structure coupled with the PMR pole, the method comprising;

providing a hard mask, a first portion of the hard mask residing on the PMR pole, a second portion of the hard mask residing on an other structure;

providing an intermediate layer, the intermediate layer surrounding at least the PMR pole;

performing a planarization on at least the intermediate layer to remove the first portion of the hard mask residing on the PMR pole without completely removing the second portion of the hard mask on the other structure;

removing a remaining portion of the hard mask on the other structure;

providing a write gap on the PMR pole;

providing a shield on the write gap;

wherein the shield includes a notch having a height, the notch residing substantially above the PMR pole and wherein the planarization removes a portion of the intermediate layer having a thickness based on the height of the notch; and

wherein the PMR pole has a PMR pole top surface and wherein the intermediate layer has an as-deposited top surface, the performing the planarization further comprising:

performing a thickness measurement on the intermediate layer distal from the PMR pole to determine an intermediate layer thickness; and

ending the planarization when the intermediate thickness corresponds to an exposed surface of the intermediate layer being lower than the as-deposited top surface and higher than the PMR pole top surface.

11. The method of claim 10 wherein the intermediate layer includes aluminum oxide.

12. The method of claim 10 wherein the performing the thickness measurement further includes performing an optical measurement.

13. A method for providing a perpendicular magnetic recording (PMR) transducer including a PMR pole and a yoke structure coupled with the PMR pole, the method comprising;

providing a hard mask, a first portion of the hard mask residing on the PMR pole, a second portion of the hard mask residing on an other structure;

providing an intermediate layer, the intermediate layer surrounding at least the PMR pole;

performing a planarization on at least the intermediate layer to remove the first portion of the hard mask residing on the PMR pole without completely removing the second portion of the hard mask on the other structure;

providing a mask on the PMR pole after the planarization has been performed and before a write gap is provided

removing a remaining portion of the hard mask on the other structure;

wherein the removing the remaining part of the hard mask further includes removing the remaining part of the hard mask on the yoke structure after the mask is provided;

removing the mask before the write gap is provided and after the remaining part of the hard mask is removed;

providing the write gap on the PMR pole; and

providing a shield on the write gap.

14. A method for providing a perpendicular magnetic recording (PMR) transducer including a PMR pole and a yoke structure coupled with the PMR pole, the method comprising;

providing a planarization stop layer, at least a portion of the planarization stop layer residing on the PMR pole;

providing a hard mask, a first portion of the hard mask residing on the PMR pole, a second portion of the hard mask residing on the yoke structure;

providing an intermediate layer, the intermediate layer surrounding at least the PMR pole;

performing a planarization on at least the intermediate layer, the planarization removing the first portion of the hard mask residing on the PMR pole without completely removing the second portion of the hard mask on the yoke structure;

removing a remaining part of the hard mask on the yoke structure;

removing a remaining portion of the planarization stop layer on the PMR pole after the planarization has been performed, the step of removing the remaining portion of the hard mask further comprising

providing a mask on the PMR pole after the planarization has been performed and before the remaining part of the hard mask is removed; and

removing the mask before a write gap is provided;

providing the write gap on the PMR pole; and

providing a shield on the write gap;

wherein the shield includes a notch having a height substantially above the PMR pole.

15. A method for providing a perpendicular magnetic recording (PMR) head comprising:

providing a PMR transducer including a PMR pole and a yoke structure coupled with the PMR pole, the providing the PMR transducer further including

providing a planarization stop layer, at least a portion of the planarization stop layer residing on the PMR pole;

providing a hard mask, a first portion of the hard mask residing on the PMR pole, a second portion of the hard mask residing on the yoke structure;

providing an intermediate layer, the intermediate layer surrounding at least the PMR pole;

performing a planarization on at least the intermediate layer, the planarization removing a thickness of the intermediate layer and removing the first portion of the hard mask residing on the PMR pole without completely removing the second portion of the hard mask on the yoke structure;

removing a remaining part of the hard mask on the yoke structure;

removing a remaining portion of the planarization stop layer on the PMR pole after the planarization has been performed;

providing a write gap on the PMR pole; and

providing a shield on the write gap;

wherein the shield includes a notch having a height substantially above the PMR pole, the thickness of the intermediate layer removed in the planarization being based on the height of the notch.