Ink jet printhead with nozzle assemblies having fluidic seals
View Patent ↗The invention provides for an ink jet printhead having a wafer substrate and a plurality of nozzle assemblies arranged in an array on the substrate and the product of dielectric and metal layers deposited on the wafer substrate and etched, such that the wafer substrate and layers define ink inlet apertures. Each nozzle assembly includes a wall portion bounding a respective ink inlet aperture, a crown portion that defines a nozzle opening, and a skirt portion depending from the crown portion to form part of a peripheral wall of the nozzle assembly. The crown and skirt portions are displaceable with respect to the wall portion to alter a volume of a nozzle chamber defined by the wall, crown and skirt portions such that when the volume is altered, ink is ejected from the nozzle opening. The nozzle assembly also includes a thermal actuator that interconnects the crown and skirt portion with the substrate and is configured to operatively displace the crown and skirt portions on receipt of an electrical signal from the drive circuitry. The wall portion and skirt portion are configured such that a fluidic seal is defined between the wall portion and skirt portion to inhibit the egress of ink during displacement of the crown and skirt portions.
1. An ink jet printhead comprising:
a wafer substrate;
a plurality of nozzle assemblies arranged in an array on the substrate and the product of dielectric and metal layers deposited on the wafer substrate and etched, such that the wafer substrate and layers define ink inlet apertures, each nozzle assembly comprising
a wall portion bounding a respective ink inlet aperture;
a crown portion that defines a nozzle opening;
a skirt portion depending from the crown portion to form part of a peripheral wall of the nozzle assembly, the crown and skirt portions being displaceable with respect to the wall portion to alter a volume of a nozzle chamber defined by the wall, crown and skirt portions such that when the volume is altered, ink is ejected from the nozzle opening; and
a thermal actuator that interconnects the crown and skirt portion with the substrate and is configured to displace the crown and skirt portions, the wall portion and skirt portion configured such that a fluidic seal is defined between the wall and skirt portions to inhibit the egress of ink during displacement of the crown and skirt portions.
2. The ink jet printhead of claim 1 , wherein the wafer substrate includes CMOS drive circuitry for driving the thermal actuator with an electrical signal.
3. The ink jet printhead of claim 1 , wherein the wall portion bounds the aperture and extends upwardly from the floor portion, the skirt portion defining a first part of a peripheral wall of the nozzle chamber and the wall portion defining a second part of the peripheral wall of the nozzle chamber.
4. The ink jet printhead of claim 3 , in which the skirt portion is received within a periphery of the wall portion during relative displacement of the wall and skirt portions.
5. The ink jet printhead of claim 4 , in which the wall portion has an inwardly directed lip at its free end which, together with the skirt portion and ink in the nozzle chamber, defines the fluidic seal.
6. The ink jet printhead of claim 1 , wherein the actuator is connected to an anchor extending upwardly from the substrate, said anchor mounted on conductive pads which form an electrical connection with the actuator.
7. The ink jet printhead of claim 1 , wherein the actuator comprises a first active beam arranged above a second passive beam, the beams made from a conductive ceramic material.
8. The ink jet printhead of claim 1 , wherein the crown portion has a raised rim that defines the nozzle opening to facilitate the formation of a meniscus of ink, in use.