Magnetic write pole fabrication
View Patent ↗Write elements and methods of fabricating magnetic write poles are described. For one method, a vertical mask structure is formed on a magnetic layer in locations of a pole tip and a yoke of a write pole. The vertical mask structure may be formed by coating vertical surfaces of resists with an atomic layer deposition (ALD) process or a similar process. A removal process is then performed around the vertical mask structure to define the pole tip and part of the yoke of the write pole, and the vertical mask structure is removed. A lower portion of the pole tip is them masked while the upper portion of the pole tip and the part of the yoke is exposed. The upper portion of the pole tip and the part of the yoke are then expanded with magnetic material, such as with a plating process.
1. A method of fabricating a magnetic write pole, the method comprising:
forming a first mask structure on a magnetic layer, wherein the first mask structure corresponds with a location of a pole tip of the write pole and corresponds with a location of the yoke of the write pole;
performing a removal process around the first mask structure to define the pole tip and part of the yoke;
removing the first mask structure;
forming a second mask structure on a lower portion of the pole tip proximate to an air bearing surface;
expanding an upper portion of the pole tip with magnetic material to increase a width of the upper portion of the pole tip; and
expanding the part of the yoke with the magnetic material to increase a width of the part of the yoke.
2. The method of claim 1 wherein forming a first mask structure comprises:
forming a resist structure on the magnetic layer with vertical surfaces of the resist structure corresponding with the location of the pole tip and the location of the yoke;
forming a coating layer on vertical and horizontal surfaces of the resist structure;
performing a removal process to remove the coating layer on the horizontal surfaces of the resist structure resulting in the first mask structure formed from the remaining coating layer on the vertical surfaces; and
removing the resist structure.
3. The method of claim 2 wherein forming a coating layer on vertical and horizontal surfaces of the resist structure comprises:
performing an atomic layer deposition (ALD) process to form the coating layer on vertical and horizontal surfaces of the resist structure.
4. The method of claim 3 wherein the coating layer comprises alumina.
5. The method of claim 3 wherein the resist structure comprises polyimide.
6. The method of claim 1 wherein expanding an upper portion of the pole tip with magnetic material comprises:
plating the magnetic material on the upper portion of the pole tip that is exposed by the second mask structure.
7. The method of claim 1 wherein expanding the part of the yoke with the magnetic material comprises:
plating the magnetic material on the part of the yoke.
8. The method of claim 1 further comprising:
depositing a non-magnetic material on the pole tip; and
forming a wrap-around shield proximate to the pole tip.
9. The method of claim 1 further comprising:
forming a yoke stitch layer on the part of the yoke.
10. The method of claim 1 wherein:
the pole tip formed in the removal process has a width less than 60 nanometers; and
the width of the upper portion of the pole tip after expanding with the magnetic material is less than three times the width of the lower portion of the pole tip.
11. A method of fabricating a magnetic write pole, the method comprising:
forming a pole tip and part of a yoke structure using an atomic layer deposition (ALD) masking process;
masking a lower portion of the pole tip proximate to an air bearing surface;
plating an upper portion of the pole tip with magnetic material to increase an initial width of the upper portion of the pole tip; and
plating the yoke structure with the magnetic material to increase an initial width of the yoke structure.
12. The method of claim 11 wherein forming a pole tip and part of a yoke structure using an ALD masking process comprises:
forming a resist structure on a magnetic layer with vertical surfaces of the resist structure corresponding with a location of the pole tip and a location of the yoke of the write pole;
forming a mask structure on the vertical surfaces of the resist structure, wherein the mask structure covers portions of the magnetic layer corresponding with the location of the pole tip and the location of the yoke;
removing the resist structure;
removing portions of the magnetic layer that are not covered by the vertical structure to form the pole tip of the magnetic write pole and the part of the yoke structure; and
removing the vertical structure.
13. The method of claim 12 wherein the resist structure comprises polyimide.
14. The method of claim 12 wherein forming a mask structure comprises:
forming the mask structure by depositing alumina with the ALD process.
15. The method of claim 11 further comprising:
depositing a non-magnetic material on the pole tip; and
forming a wrap-around shield proximate to the pole tip.
16. The method of claim 11 further comprising:
forming a yoke stitch layer on the yoke structure.