CMOS image sensor and fabricating method thereof
View Patent ↗A CMOS image sensor and method of manufacture reduces the problem of electron loss in a floating diffusion area. A method of fabricating a CMOS image sensor includes forming a gate electrode over a first conductive type semiconductor substrate. A second conductive type first diffusion layer is formed within the semiconductor substrate to be aligned with an edge of one side of the gate electrode. A spacer may be attached to both sidewalls of the gate electrode. A first conductive type second diffusion layer may be formed within the first diffusion layer to leave a distance amounting to a width of the spacer in-between. A second conductive type third diffusion layer may be formed within the semiconductor substrate to be aligned with an edge of the other side of the gate electrode. A first conductive type fourth diffusion layer may be formed over the third diffusion layer, and a first conductive type fifth diffusion layer may be formed under the third diffusion layer.
1. A method comprising:
forming a gate electrode over a first conductive type semiconductor substrate;
forming a second conductive type first diffusion layer within the semiconductor substrate to be aligned with an edge of a first side of the gate electrode;
forming a spacer attached to sidewalls of the gate electrode;
forming a first conductive type second diffusion layer within the first diffusion layer spaced from the gate electrode by a width of the spacer;
forming a second conductive type third diffusion layer within the semiconductor substrate aligned with an edge of a second side of the gate electrode; and
forming a first conductive type fourth diffusion layer over the third diffusion layer and a first conductive type fifth diffusion layer under the third diffusion layer.
2. The method of claim 1 , comprising forming a contact for the third diffusion layer after forming the third diffusion layer.
3. The method of claim 2 , wherein the contact is configured to extend to the third diffusion layer via the fourth diffusion layer.
4. The method of claim 1 , wherein the third diffusion layer is more heavily doped than the first diffusion layer.
5. The method of claim 1 , wherein each of the fourth and fifth diffusion layers is formed at a dose of approximately 10 14 to approximately 10 16 ions/cm 2 .
6. The method of claim 1 , wherein each of the fourth and fifth diffusion layers is formed by selective ion implantation over the upper part of the third diffusion layer using a photomask.
7. The method of claim 1 , whereby a transfer transistor is formed, comprising:
forming a photodiode area on the substrate and connected to the transfer transistor;
forming a floating diffusion area on the substrate and connected to the transfer transistor;
forming a reset transistor on the substrate and connected to the transfer transistor; and
forming a drive transistor on the substrate and connected to the transfer transistor, whereby a unit pixel of a CMOS image sensor is formed.
8. The method of claim 7 , comprising:
forming a select transistor on the substrate and connected to the drive transistor.
9. The method of claim 7 , comprising:
forming a device isolation film for inter-unit-pixel isolation.
10. The method of claim 7 , wherein forming a second conductive type first diffusion layer within the semiconductor substrate to be aligned with an edge of a first side of the gate electrode is performed simultaneously with forming the floating diffusion layer.
11. The method of claim 1 , wherein the first conductive type is a p-type, and the second conductive type is an n-type.