Electron-emitting device
View Patent ↗An electron-emitting device and a fabricating method thereof are provided. First, a substrate, having a first side and a second side which is opposite to the first side, is provided. Afterwards, a first electrode pattern layer is formed on the first side of the substrate. Next, a conductive pattern layer is formed on the substrate and the first electrode pattern layer. After that, an electron-emitting region is formed in the conductive pattern layer. Then, a second electrode pattern layer is formed on the second side of the substrate and partially covers the conductive pattern layer. The fabricating method has a simple fabricating process and a low fabricating cost.
1. An electron-emitting device, comprising:
a substrate, having a first side and a second side which is opposite to the first side;
a first electrode pattern layer, disposed on the first side of the substrate;
a conductive pattern layer, disposed on the substrate and the first electrode pattern layer, the conductive pattern layer partially covering the first electrode pattern layer, wherein the conductive pattern layer has an electron-emitting region; and
a second electrode pattern layer, disposed on the second side of the substrate, the second electrode pattern layer partially covering the conductive pattern layer,
wherein, the first electrode pattern layer, the conductive pattern layer and the second electrode pattern layer are stacked in this order on the substrate,
there is a segmented step on an edge of the conductive pattern layer covering the first electrode pattern layer, and
the electron-emitting region is disposed at the segmented step in the conductive pattern layer, and
a plurality of electrons are transported in the first electrode pattern layer and the second electrode pattern layer, and the electrons are transported into the conductive pattern layer for being emitted out from the electron-emitting region.
2. The electron-emitting device as claimed in claim 1 , wherein the electron-emitting region comprises a slit.
3. The electron-emitting device as claimed in claim 2 , wherein a width of the slit is 5-1,000 nm.
4. The electron-emitting device as claimed in claim 1 , wherein a material of the substrate comprises glass or silicon.
5. The electron-emitting device as claimed in claim 1 , further comprising an insulating layer disposed on the substrate.
6. The electron-emitting device as claimed in claim 5 , wherein a material of the insulating layer comprises silicon dioxide or aluminum oxide.
7. The electron-emitting device as claimed in claim 1 , wherein materials of the first electrode pattern layer and the second electrode pattern layer are selected from Pt, Ta, Ti, Al, Cu, Ag, Au and any alloy of the foregoing.
8. The electron-emitting device of claim 1 , wherein a material of the conductive pattern layer is selected from Pd, Pt, Au, W, Rh, Ir, Al, Ti, V, Ga, Y, Zr, Nb, Mo, Ag, Cd, Sn, Ta, La, Ce, Nd, Gd and any metal oxides, metal nitrides, metal complex oxides and metal complex alloys of the foregoing.
9. The electron-emitting device as claimed in claim 1 , further comprising an adhesion layer disposed in at least one of the following three location,
between the substrate and the first electrode pattern layer,
between the substrate and the second electrode pattern layer, or
between the conductive pattern layer and the second electrode pattern layer.
10. The electron-emitting device as claimed in claim 9 , wherein a material of the adhesion layer is selected from Ti, TiN, Ta, TaN and any combination of the foregoing.