Micro-electromechanical nozzle arrangement with non-wicking roof structure for an inkjet printhead
View Patent ↗The invention relates to a micro-electromechanical nozzle arrangement for an inkjet printhead. The nozzle arrangement includes a substrate defining an inverted pyramidal ink chamber with an ink supply channel leading through the substrate, the substrate having a layer of drive circuitry. The arrangement also includes a roof structure connected to the drive circuitry layer and covering the ink chamber, the roof structure defining a fluid ejection nozzle rim above said chamber in addition to ink flow guide rails to minimize wicking along the nozzle rim according to surface tension effects of ink in the chamber. Also included is a plurality of actuators displaceable with respect to, and radially spaced about, the nozzle rim, and in between, the guide rails, each actuator having a serpentine heater element configured to thermally expand upon receiving current from the drive circuitry thereby moving said actuators into the chamber operatively increasing a fluid pressure inside the chamber to eject a drop of ink via the ejection nozzle.
1. A micro-electromechanical nozzle arrangement for an inkjet printhead, said arrangement comprising:
a substrate defining an inverted pyramidal ink chamber with an ink supply channel leading through the substrate, said substrate having a layer of drive circuitry;
a roof structure connected to the drive circuitry layer and covering the ink chamber, the roof structure defining a fluid ejection nozzle rim above said chamber in addition to ink flow guide rails to minimize wicking along the nozzle rim according to surface tension effects of ink in the chamber; and
a plurality of actuators displaceable with respect to, and radially spaced about, the nozzle rim, and in between, the guide rails, each actuator having a serpentine heater element configured to thermally expand upon receiving current from the drive circuitry thereby moving said actuators into the chamber operatively increasing a fluid pressure inside the chamber to eject a drop of ink via the ejection nozzle.
2. The nozzle arrangement of claim 1 , wherein each actuator is cantilevered to a heater element in a bendable manner.
3. The nozzle arrangement of claim 1 , wherein the serpentine heater element is made from gold or copper.
4. The nozzle arrangement of claim 1 , wherein the drive circuitry layer includes a CMOS layer.
5. The nozzle arrangement of claim 1 , wherein the actuators are made from a polytetrafluoroethylene (PTFE) layer which sandwiches the heater element.
6. The nozzle arrangement of claim 1 , wherein the ink supply channel is created by means of a deep silicon back edge of the substrate utilizing a plasma etcher.
7. The nozzle arrangement of claim 1 , having a central arm which includes both metal and PTFE portions to provide structural support for the actuators.