Humidity tolerant electro-optic device
View Patent ↗The invention relates to an electro-optic modulator structure containing an additional set of bias electrodes buried within the device for applying bias to set the operating point. Thus the RF electrodes used to modulate incoming optical signals can be operated with zero DC bias, reducing electrode corrosion by galvanic and other effects that can be present in non-hermetic packages. The bias electrodes are at least partially separated from the substrate with a buffer layer, which in one embodiment has a small amount of conductivity. This conductive buffer layer reduces optical loss from the bias electrodes and also reduces DC drift.
1. An electro-optic device comprising:
an electro-optic substrate having an optical waveguide formed therein;
an RF electrode structure disposed for generating an RF electric field in the optical waveguide, the RF electrode structure including a first RF electrode;
a first buffer layer disposed between the substrate and the first RF electrode;
a bias electrode structure disposed for generating a low frequency or DC electric field in the optical waveguide, the bias electrode structure including a first bias electrode at least partially disposed between the first buffer layer and the first RF electrode; and
a second buffer layer disposed between the first RF electrode and the first bias electrode.
2. An electro-optic device according to claim 1 , wherein a thickness of the first buffer layer is selected such a portion of the first bias electrode disposed between the first buffer layer and the first RF electrode significantly contributes to the low frequency or DC electric field generated in the optical waveguide.
3. An electro-optic device according to claim 1 , wherein the first buffer layer is more conductive than the second buffer layer.
4. An electro-optic device according to claim 3 , wherein the first buffer layer comprises a doped SiO 2 layer.
5. An electro-optic device according to claim 1 , wherein the first bias electrode and the first RF electrode are substantially aligned with the optical waveguide.
6. An electro-optic device according to claim 1 , wherein the first bias electrode comprises a lower portion in contact with the electro-optic substrate and an upper portion that at least partially covers the first buffer layer.
7. An electro-optic device according to claim 1 , wherein the first buffer layer comprises at least one strip substantially aligned with the optical waveguide.
8. An electro-optic device according to claim 7 , wherein the first bias electrode substantially encapsulates the at least one strip.
9. An electro-optic device according to claim 1 , wherein the first bias electrode has one of a substantially bracket-shaped, L-shaped, E-shaped, and T-shaped cross-section.
10. An electro-optic device according to claim 1 , wherein first buffer layer is planarized over the electro-optic substrate and provides a spacer between the first bias electrode and the electro-optic substrate.
11. An electro-optic device according to claim 10 , wherein the first bias electrode includes two parallel strips.
12. An electro-optic device according to claim 1 , wherein the first bias electrode comprises a first material having a first resistivity, the first RF electrode comprises a second material having a second resistivity, and the first resistivity is higher than the second resistivity.
13. An electro-optic device according to claim 1 , wherein the electro-optic substrate comprises one of Z-cut lithium niobate and Z-cut lithium tantalate.
14. An electro-optic device according to claim 1 , comprising a bleed layer disposed between the first RF electrode and the second buffer layer.
15. An electro-optic device according to claim 14 , wherein the bleed layer comprises tantalum silicon nitride, and wherein the first RF electrode is deposited on the bleed layer in the absence of an adhesion layer.
16. An electro-optic device according to claim 1 , wherein the first bias electrode comprises tantalum silicon nitride.
17. An electro-optic device according to claim 1 , wherein the first bias electrode is DC isolated from the first RF electrode.
18. An electro-optic device according to claim 1 , wherein the first bias electrode comprises a first bias signal electrode having a first plurality of elongated segments.
19. An electro-optic device according to claim 18 , wherein each segment of the first plurality of elongated segments is coupled to a common bias electrode.
20. An electro-optic device according to claim 19 , wherein the common bias electrode is coupled to a high conductivity strip along its length.
21. An electro-optic device according to claim 19 , wherein the common bias electrode is coupled to the first plurality of elongated segments with a plurality of feed lines that extend through a second plurality of elongated segments of a second bias signal electrode.
22. An electro-optic device according to claim 19 , wherein the common bias electrode is coupled to the first plurality of elongated segments with a plurality of feed lines spaced in dependence upon a predetermined frequency response of the bias electrode structure.
23. A method of fabricating an electro-optic device comprising:
providing an electro-optic substrate having an optical waveguide formed therein;
forming a first buffer layer on the electro-optic substrate;
forming a bias electrode layer on at least one of the first buffer layer and the electro-optic substrate, the bias electrode layer patterned to provide a first bias electrode that at least partially extends over the first buffer layer;
forming a second buffer layer on the bias electrode layer; and
forming an RF electrode layer on the second buffer layer, the RF electrode layer patterned to include a first RF electrode.
24. A method according to claim 23 , wherein forming the first buffer layer comprises depositing a first dielectric material on the electro-optic substrate, and wherein forming the second buffer layer comprises depositing a second dielectric material on the bias electrode layer, the first dielectric material having a higher conductivity than the second dielectric material.
25. A method according to claim 23 , wherein forming the first buffer layer comprises depositing a first dielectric material on the electro-optic substrate, and patterning the first dielectric material such that the first buffer layer includes at least one strip substantially aligned with the optical waveguide.
26. A method according to claim 25 , wherein forming the bias electrode layer comprises depositing a high resistivity bias electrode material on at least one of the first buffer layer and the electro-optic substrate, and patterning the high resistivity bias electrode material such that the first bias electrode substantially encapsulates the at least one strip.
27. A method according to claim 25 , wherein forming the bias electrode layer comprises depositing a high resistivity bias electrode material on at least one of the first buffer layer and the electro-optic substrate, and patterning the high resistivity bias electrode material such that the first bias electrode includes a lower split portion and at least one partial cap portion.