Method for fabricating resin-molded semiconductor device having posts with bumps
View Patent ↗A semiconductor apparatus includes a semiconductor device to be mounted on a circuit board; a plurality of conductive posts electrically connected to the semiconductor device; and a plurality of conductive bumps each provided on an outer end of each of the conductive posts, so that the plurality of conductive bump is soldered onto the circuit board when the semiconductor device is mounted on the circuit board. A distance between a peripheral edge of the semiconductor device and an outer edge of the conductive post is determined to be narrow so that a solderbility or wetting condition of the conductive bumps can be visibly recognized easily.
1. A method for fabricating a plurality of semiconductor apparatuses, each apparatus including a respective one of a plurality of semiconductor devices, a plurality of conductive posts electrically connected to the semiconductor device, a plurality of conductive bumps each provided on an outer end of each of the conductive posts so that the plurality of conductive bumps can be soldered onto a circuit board for mounting the semiconductor device thereon, and a molding resin covering a surface of the semiconductor device, the molding resin shaped to have a step at a peripheral edge of the semiconductor device entirely, the step having upper and lower level portions, the method comprising the steps of:
providing a semiconductor wafer on which the plurality of semiconductor devices are formed, each semiconductor device having electrode pads thereon;
for each semiconductor device, providing a plurality of conductive posts connected to the electrode pads thereof;
sealing the semiconductor devices with a molding resin so that an upper surface of the molding resin is on the same plane with upper surfaces of the conductive posts, by covering all side surfaces of each of the conductive posts with the molding resin;
removing a part of the molding resin to be located at a peripheral edge so that the peripheral edge of the molding resin has a step, the step of the molding resin having upper and lower level portions and contacting the side surfaces of each of the conductive posts, the removing exposing a portion of least one of the side surfaces of at least one of the conductive posts;
providing conductive bumps on outer ends of the conductive posts; and
dicing the semiconductor wafer to form a plurality of individual semiconductor apparatuses.
2. The method according to claim 1 , wherein the difference in level between the upper portion and lower portion of the step is half of a thickness of the mold resin.
3. The method according to claim 1 , wherein the difference in level between the upper portion and lower portion of the step is in a range between 40 to 60 micrometers.
4. The method according to claim 1 , wherein the conductive bumps are of solder.
5. The method according to claim 1 , wherein the removing the part of the molding resin is performed using a laser beam.
6. The method according to claim 1 , wherein the dicing the semiconductor wafer is performed in regions of the semiconductor wafer disposed away from the conductive posts.
7. A method for fabricating a plurality of semiconductor apparatuses, each apparatus including a respective one of a plurality of semiconductor devices, a plurality of conductive posts electrically connected to the semiconductor device, a plurality of conductive bumps each provided on an outer end of each of the conductive posts so that the plurality of conductive bumps can be soldered onto a circuit board for mounting the semiconductor device thereon, and a molding resin covering a surface of the semiconductor device, the molding resin shaped to have a step at a peripheral edge of the semiconductor device entirely, the step having upper and lower level portions, the method comprising the steps of:
providing a semiconductor wafer on which the plurality of semiconductor devices are formed, each semiconductor device having electrode pads thereon;
for each semiconductor device, providing a plurality of conductive posts connected to the electrode pads thereof;
molding the semiconductor devices with a molding resin so that an upper surface of the molding resin is on the same plane with upper surfaces of the conductive posts;
removing a part of the molding resin to be located at a peripheral edge so that the peripheral edge of the molding resin has a step, the step having upper and lower level portions, the removing exposing a side surface of at least one of the conductive posts;
providing conductive bumps on outer ends of the conductive posts; and
dicing the semiconductor wafer to form a plurality of individual semiconductor apparatuses.
8. A The method according to claim 7 , wherein the difference in level between the upper portion and lower portion of the step is half of a thickness of the mold resin.
9. A The method according to claim 7 , wherein the difference in level between the upper portion and lower portion of the step is in a range between 40 to 60 micrometers.
10. A The method according to claim 7 , wherein the conductive bumps are of solder.
11. The method according to claim 7 , wherein the removing the part of the molding resin is performed using a laser beam.
12. The method according to claim 7 , wherein the dicing the semiconductor wafer is performed in regions of the semiconductor wafer disposed away from the conductive posts.