Structure for loading substrate in substrate bonding apparatus for fabricating liquid crystal display device
View Patent ↗A substrate bonding apparatus for use in fabricating LCD devices substantially prevents substrates held to upper stages from sagging. The substrate bonding apparatus may, for example, include upper and lower stages having a plurality of passages for holding respective substrates; suction force applying means having one end mounted within each passage for transmitting a suction force to operably proximate portions of a substrate, wherein the one end of the suction force applying means is projectable from within each passage to a predetermined distance from the stage; and a vacuum pump for providing a suction force to the suction force applying means.
1. A structure for holding a substrate within a substrate bonding apparatus, comprising:
a stage having a contact surface;
at least one passage arranged within the stage and intersecting the contact surface;
a suction force applying means for transmitting a suction force a predetermined distance from the contact surface, wherein the suction force applying means is arranged within each passage, and wherein a portion of the suction force applying means is selectively projectable from within a respective passage to the predetermined distance from the contact surface; and
a vacuum pump generating the suction force.
2. The structure of claim 1 , wherein the suction force applying means includes:
a pad having at least one vacuum hole transmitting the suction force to an operably proximate portion of a substrate;
a moving pipe in fluid communication with the at least one vacuum hole and the vacuum pump, wherein the moving pipe is movable within the passage; and
a driving part moving the moving pipe within the passage.
3. The structure of claim 2 , wherein the at least one passage has first cross-sectional dimensions; the pad has second cross-sectional dimensions; and
the second cross-sectional dimensions are smaller than the first cross-sectional dimensions.
4. The structure of claim 3 , wherein the second cross-sectional dimensions are substantially conformal to the first cross-sectional dimensions.
5. The structure of claim 2 , wherein the driving part comprises an actuator; and
the moving pipe is an axis of the actuator.
6. The structure of claim 2 , wherein the driving part comprises a step motor; and
the moving pipe is an axis of the motor.
7. The structure of claim 1 , further comprising sensing means for measuring a distance between the contact surface and a proximately arranged substrate.
8. The structure of claim 7 , wherein the sensing means comprises an interval check sensor.
9. The structure of claim 1 , further comprising a plurality of vacuum holes arranged within the stage and in fluid communication with the vacuum pump transmitting the generated suction force from the contact surface.
10. The structure of claim 1 , wherein the stage comprises an upper stage.
11. The structure of claim 1 , wherein the stage comprises a lower stage.