Semiconductor device and manufacture method therefor
View Patent ↗A semiconductor device is provided which is suitable for a DRAM with word lines and configured to have a trench gate transistor and suppress an increase in the capacitance of a word line without affecting the transistor characteristics. The semiconductor device includes a trench gate transistor which is provided with: a trench which is provided with vertical sides and is formed in a semiconductor substrate; a gate electrode which is formed inside the trench via a gate dielectric film; and a source and a drain which are provided at the semiconductor substrate in the vicinity of the gate electrode via the gate dielectric film, wherein at least one of the thickness of the gate dielectric film in a region contacting the source and the thickness of the gate dielectric film in a region contacting the drain are larger than the thickness of the gate dielectric film formed inside the trench.
1. A method of manufacturing a semiconductor device comprising:
forming an element isolation dielectric film in a semiconductor substrate;
forming a dielectric film and a nitride film on the semiconductor substrate in which the element isolation dielectric film is formed;
forming a trench with vertical sides in the semiconductor substrate with the nitride film used as a mask;
forming an oxidation accelerating portion by implanting ions in a surface portion of the semiconductor substrate at a periphery of the trench;
forming a gate oxide film inside the trench by oxidizing a region of the semiconductor substrate inside the trench by oxidation, and forming a thick film part, which is thicker than the gate oxide film inside the trench, at the oxidation accelerating portion;
forming a gate electrode in another trench inward of the gate oxide film; and
forming a source and a drain by implanting ions in the semiconductor substrate adjacent to the gate electrode.
2. The method as recited in claim 1 , wherein at the time of implanting the ions in the surface portion of the semiconductor substrate at the periphery of the trench, the ions are implanted in a tilted manner with respect to the depth direction of the trench, and the oxidation accelerating portion is formed in the surface portion of the semiconductor substrate at a periphery of an inlet portion of the trench.
3. The method as recited in claim 1 , wherein the oxidation accelerating portion forms a part of the source and the drain.
4. The method as recited in claim 1 , wherein implantation of the ions into the surface portion of the semiconductor substrate at the periphery of the trench turns an ion-implanted portion into amorphous silicon.
5. The method as recited in claim 1 , wherein the ions to be implanted to form the oxidation accelerating portion have the same conductivity type as that of the ions for forming the source and the drain.
6. The method as recited in claim 1 , wherein an amount of implantation of the ions to be implanted into the surface portion of the semiconductor substrate at the periphery of the trench is set to 5×10 15 to 5×10 16 atoms/cm 2 .
7. The method as recited in claim 1 , wherein the ions to be implanted to form the oxidation accelerating portion have an accelerating oxidation characteristic.
8. The method as recited in claim 6 , wherein the ion implantation angle at the time of implanting the ions is defined as a tilt angle theta with respect to the depth direction of the trench, and the tilt angle theta is set to the range of tan −1 {c/(a+b)}<theta<tan −1 (c/b) where a is the depth of a region to be the source and the drain, b is the thickness of the nitride film, and c is the width of the trench.