Orthogonal fluxgate magnetic field sensor
Orthogonal fluxgate sensor for measuring an external magnetic field Hext, comprising a conductor for carrying an excitation current lexc, a ferromagnetic material adapted to saturate in the presence of a magnetic field generated by the excitation current, and at least one pick-up coil adapted to detect variations in the magnetic field in the vicinity of the magnetic material. The excitation conductor comprises a substantially linear elongated portion of conductive, non-magnetic material, forming an excitation rod ( 6 ). The magnetic material surrounds the excitation rod in the form of a cladding ( 8 ).
1. Orthogonal fluxgate sensor for measuring an external magnetic field H ext , comprising a conductor for carrying an excitation current I exc , a saturable magnetic material adapted to saturate in the presence of a magnetic field generated by the excitation current, and at least one pick-up coil ( 10 ) adapted to detect variations in the magnetic field in the vicinity of the magnetic material, wherein the excitation conductor comprises a substantially linear elongated portion of conductive, non-magnetic material, forming an excitation rod ( 6 ), the magnetic material surrounding the excitation rod in the form of a cladding ( 8 ) and wherein the pick-up coil comprises at least two layers of planar spirals ( 12 a , 12 b ) stacked one of top of the other.
2. Sensor according to claim 1 , wherein the ferromagnetic cladding is deposited around the excitation rod and in direct contact therewith.
3. Sensor according to claim 1 , wherein the pick-up coil, ferromagnetic cladding, and excitation conductor are built up on a substrate ( 16 , 16 a ) in layers formed by deposition and patterning.
4. Sensor according to claim 3 , wherein the sensor further comprises a circuit for driving the excitation current and processing the pick-up coil signals, integrated in the substrate.
5. Sensor according to claim 4 , wherein the processing circuit and pick-up coils are integrated in a CMOS process, on which the ferromagnetic cladding and excitation rod are built up.
6. Sensor according to claim 1 , wherein the pick-up coil comprises at least two coil portions, one at each longitudinal end ( 14 ) of the ferromagnetic cladding.
7. Sensor according to claim 6 , wherein centers of the respective pick-up coil portions are positioned adjacent said longitudinal ends of the ferromagnetic cladding.