Polishing pad conditioner
View Patent ↗The invention provides a polishing pad conditioner that enables stabilization of brazing metal melting point, minimization of abrasive grain detachment by uniformizing and stabilizing abrasive grain brazing condition, and enhancement of flatness by minimizing thermal deformation of the metal support. The polishing pad conditioner is fabricated by brazing multiple abrasive grains to the surface of a metal support with brazing metal, wherein the composition of the brazing metal expressed in mass % is such that 70%≦Ni+Fe≦90% (provided that 0≦Fe/(Ni+Fe)≦0.4), 1%≦Cr≦25%, 2%≦Si+B≦15% (provided that 0≦B/(Si+B)≦0.8), and 0.1%≦P≦8%.
1. A polishing pad conditioner comprising multiple abrasive grains brazed to a surface of a metal support with a brazing metal, wherein the composition of the brazing metal expressed in mass % is such that:
70%≦Ni+Fe≦90%, provided that 0≦Fe/(Ni+Fe)≦0.4,
1%≦Cr≦25%,
2%≦Si+B≦15%, provided that 0≦B/(Si+B)≦0.8, and
0.1%≦P≦8%.
2. The polishing pad conditioner according to claim 1 , wherein the abrasive grains are grains of at least one of diamond, cubic boron nitride, boron carbide, silicon carbide, and aluminum oxide.
3. The polishing pad conditioner according to claim 1 , wherein the abrasive grains have a size in the range of 3 μm to 300 μm inclusive.
4. The polishing pad conditioner according to claim 1 , wherein the metal support is made of stainless steel.