Optoelectronic semiconductor chip
View Patent ↗An optoelectronic semiconductor chip is disclosed which emits electromagnetic radiation from its front side ( 7 ) during operation, comprising a semiconductor layer sequence ( 1 ) having an active region ( 4 ) suitable for generating the electromagnetic radiation, and a separately produced TCO supporting substrate ( 10 ), which is arranged at the semiconductor layer sequence and has a material from the group of transparent conductive oxides (TCO) and mechanically supports the semiconductor layer sequence ( 1 ).
1. An optoelectronic semiconductor chip which emits electromagnetic radiation from a front side during operation, comprising:
a semiconductor layer sequence based on a III-V compound semiconductor material and having an active region suitable for generating the electromagnetic radiation;
a separately produced TCO supporting substrate, which is arranged at the semiconductor layer sequence and has a material comprising a transparent conductive oxide (“TCO”) and mechanically supports the semiconductor layer sequence; and
a TCO contact layer which is arranged between the semiconductor layer sequence and the TCO supporting substrate, said TCO contact layer producing an electrical contact between the semiconductor layer sequence and the TCO supporting substrate and having a material comprising a transparent conductive oxide (TCO),
wherein the TCO supporting substrate is bonded to the TCO contact layer.
2. The optoelectronic semiconductor chip as claimed in claim 1 , wherein a refractive index of the TCO supporting substrate is less than a refractive index of the semiconductor layer sequence.
3. The optoelectronic semiconductor chip as claimed in claim 1 , wherein the TCO supporting substrate is fitted to the semiconductor layer sequence by direct bonding, diffusion bonding or adhesive bonding.
4. The optoelectronic semiconductor chip as claimed in claim 1 , further comprising a TCO layer having a material comprising a TCO arranged between the semiconductor layer sequence and the TCO supporting substrate.
5. The optoelectronic semiconductor chip as claimed in claim 1 , wherein the TCO contact layer has a thickness which is ≧1 μm and ≦5 μm.
6. The optoelectronic semiconductor chip as claimed in claim 1 , wherein a layer that reflects the radiation of the semiconductor chip is arranged between the active region of the semiconductor layer sequence and the TCO supporting substrate.
7. The optoelectronic semiconductor chip as claimed in claim 6 , wherein the reflective layer is a distributed Bragg reflector (DBR) mirror.
8. The optoelectronic semiconductor chip as claimed in claim 1 , wherein a rear side of the semiconductor chip, arranged opposite the front side of said semiconductor chip, comprises a metal layer.
9. The optoelectronic semiconductor chip as claimed in claim 8 , wherein the metal layer is formed in reflective fashion for the radiation of the semiconductor chip.
10. The optoelectronic semiconductor chip as claimed in claim 1 , wherein the front side is roughened.
11. The optoelectronic semiconductor chip as claimed in claim 1 , wherein a current spreading layer having a material comprising a TCO is arranged on a side of the semiconductor layer sequence which faces the front side of said semiconductor chip.
12. The optoelectronic semiconductor chip as claimed in claim 1 , wherein the TCO contact layer comprises an n-doped layer which is in direct contact with the TCO supporting substrate and an n-doped transverse conductive layer which is in direct contact with the semiconductor layer sequence.
13. The optoelectronic semiconductor chip as claimed in claim 12 , wherein the n-doped layer which is in direct contact with the TCO supporting substrate has a higher doping than the n-doped transverse conductive layer which is in direct contact with the semiconductor layer sequence.