Liquid crystal display device and method for manufacturing the same
View Patent ↗A liquid crystal display panel 10 A of the invention has gate electrodes G of TFTs, scan lines 16 , and auxiliary capacitor electrodes 18 a , which are coated with a first insulating film 27 composed of a thick insulating layer 25 and thinned insulating layer 26 . A part above the auxiliary capacitor electrodes 18 a is coated only with the thinned insulating layer 26 , and drain electrodes D are extended on the first insulating film 27 , which is not thinned, so as to coat the thinned insulating layer 26 . On a second insulating film 28 provided between the pixel electrodes 20 and the drain electrodes D, contact holes 30 are formed at portions above the drain electrodes D on the first insulating film 27 , which is not thinned, above the auxiliary capacitor electrodes 18 a , and via the contact holes 30 , the pixels 20 and the drain electrodes D are electrically coupled to each other. By providing such a constitution, a liquid crystal display device and its manufacturing method can be provided, with only a small number of bright point defects, and with an increased capacitance of the auxiliary capacitor electrodes without a reduction in the aperture ratio of each pixel.
1. A liquid crystal display device comprising:
a transparent substrate;
multiple signal lines and multiple scan lines provided in a matrix on the transparent substrate;
multiple auxiliary capacitor lines provided in between the scan lines in parallel with the scan lines;
a thin film transistor including a source electrode, a gate electrode and a drain electrode provided near each intersection of the signal lines and the scan lines; and
a pixel electrode provided in each area defined by the signal lines and the scan lines, the pixel electrode electrically coupled to the drain electrode of the thin film transistor;
the gate electrode of the thin film transistor, the scan lines, and the auxiliary capacitor lines being covered with a first insulating film, and a thinned insulating layer is formed as a part of the first insulating film on the auxiliary capacitor lines;
the drain electrode being extended on the first insulating film so as to cover surfaces of a thick insulating layer and the thinned insulating layer of the first insulating film;
a second insulating film being formed in between the pixel electrode and the drain electrode;
a portion defining a contact hole being formed in the second insulating film positioned on the drain electrode on the thick insulating layer of the first insulating film; and
the pixel electrode and the drain electrode being electrically coupled via the contact hole.
2. The liquid crystal display device according to claim 1 , wherein the contact hole is positioned on the drain electrode formed on the thick insulating layer of the first insulating film on the auxiliary capacitor lines.
3. The liquid crystal display device according to claim 1 , wherein the contact hole formed on the drain electrode on the thick insulating layer of the first insulating film is positioned closer to the thin film transistor than to the thinned insulating layer.
4. The liquid crystal display device according to claim 1 , wherein the thinned insulating layer of the first insulating film of a multi-layered structure is an uppermost layer.
5. The liquid crystal display device according to claim 1 , wherein the thinned insulating layer of the first insulating film of a multi-layered structure is a layer formed closest to the transparent substrate.
6. The liquid crystal display device according to claim 1 , wherein the thinned insulating layer of the first insulating film of a multi-layered structure is the thinnest layer.
7. The liquid crystal display device according to claim 1 , wherein edges of the thinned insulating layer on the auxiliary capacitor lines are positioned further inside than edges of the auxiliary capacitor lines.
8. The liquid crystal display device according to claim 7 , wherein edge portions of the auxiliary capacitor line are covered with the first insulating film.
9. The liquid crystal display device according to claim 1 , wherein the thickness of the first insulating film is 2500 to 5500 Å and the thickness of the thinned insulating layer is 500 to 1500 Å.
10. A method for manufacturing a liquid crystal display device comprising:
providing on a transparent substrate, multiple scan lines and multiple auxiliary capacitor lines so as to be parallel with each other;
forming a first insulating film so as to cover the entire surface of the transparent substrate, and forming a thinned insulating layer as a part of the first insulating film on the auxiliary capacitor lines;
forming a semiconductor layer on a surface of the first insulating film in a position corresponding to a gate electrode formed on a part of the scan lines;
providing multiple signal lines each having a portion formed with a source electrode so as to intersect with the scan lines, and forming a drain electrode so as to cover surfaces of a thick insulating layer and the thinned insulating layer of the first insulating film;
forming a second insulating film so as to cover the substrate surface mounted with the signal lines, the source electrode, and the drain electrode;
forming a contact hole on the second insulating film positioned on the drain electrode on the thick insulating layer of the first insulating film; and
forming a pixel electrode on the second insulating film so as to be electrically coupled with the drain electrode via the contact hole.
11. The method for manufacturing a liquid crystal display device according to claim 10 , wherein
the forming the thinned insulating layer comprises:
forming the first insulating film into multiple layers in multiple times; and
removing at least one layer among the multiple layers.
12. The method for manufacturing a liquid crystal display device according to claim 11 , wherein
the forming the thinned insulating layer comprises:
removing a first-formed layer among the multiple layers of the first insulating film formed in multiple times.