Stress sensitive element
View Patent ↗A stress sensitive element includes a vibrating arm having an electrode, a beam portion integrated with the vibrating arm at both ends of the vibration arm, and a connecting portion interposed between the beam portion and the vibrating arm. The element is placed by providing a fixing portion to one of the connecting portion and the beam portion, and an extending direction of the vibrating arm is orthogonal to a stress direction to be detected.
1. A stress sensitive element comprising:
a vibrating arm having an electrode;
a beam portion integrated with the vibrating arm at both ends of the vibrating arm; and
a connecting portion interposed between the beam portion and the vibrating arm, wherein the element is placed by providing a fixing portion to one of the connecting portion and the beam portion, and an extending direction of the vibrating arm is orthogonal to a stress direction to be detected, and the fixing portion is provided to the connecting portion, and a constriction is provided to the beam portion.
2. A stress sensitive element comprising:
a vibrating arm having an electrode;
a beam portion integrated with the vibrating arm at both ends of the vibrating arm; and
a connecting portion interposed between the beam portion and the vibrating arm, wherein the element is placed by providing a fixing portion to one of the connecting portion and the beam portion, and an extending direction of the vibrating arm is orthogonal to a stress direction to be detected, and the fixing portion is provided at a substantially central portion of the beam portion, and a plurality of constrictions is provided to the beam portion in one or more symmetrical pairs on either side of the fixing portion in the extending direction of the vibrating arm.
3. The stress sensitive element according to claim 1 , wherein the vibrating arm is a double-ended tuning fork type.
4. The stress sensitive element according to claim 2 , wherein the vibrating arm is a double-ended tuning fork type.