Inspecting apparatus for glass substrate
View Patent ↗An inspecting apparatus for a glass substrate detects blurs of a green color filter layer, a blue color filter layer, a column spacer layer, a pixel layer of a thin film transistor, or the like, which are generally hardly inspected. The inspecting apparatus for a glass substrate includes: a first illumination unit supplying reflective light to a surface of the substrate to inspect whether the surface of the substrate is defective or not; a second illumination unit supplying transmissive light from a rear side of the substrate to inspect whether the interior of the substrate is defective or not; a latticed rear plate provided on a rear surface of the substrate; and a driving interferometer system generating a phase difference of light by driving such that a driving guide is moved along the rear plate or the rear plate itself is moved.
1. An inspecting apparatus for a glass substrate comprising:
a first illumination unit supplying reflective light to a surface of the substrate to inspect whether the surface of the substrate is defective or not;
a second illumination unit supplying transmissive light from a rear side of the substrate to inspect whether the interior of the substrate is defective or not;
a rear plate provided on a rear surface of the substrate; and
a driving guide disposed on a rear surface of the rear plate and generating a phase difference between the light provided from the first illumination unit and the light provided from the second illumination unit.
2. The apparatus of claim 1 , wherein the driving guide moves vertically or horizontally along the rear surface of the rear plate, and interferes with or scatters light provided from the first and second illumination units if the glass substrate is defective.
3. The apparatus of claim 2 , wherein the driving guide comprises:
a first driving guide moved horizontally along the rear surface of the rear plate; and
a second driving guide moved vertically along the rear surface of the rear plate.
4. The apparatus of claim 1 , wherein the substrate may comprise one of a color filter substrate and a thin film transistor substrate.
5. The apparatus of claim 1 , wherein the rear plate has a lattice pattern and reflects light which has passed through the substrate after being provided from the first illumination unit.
6. The apparatus of claim 5 , wherein the rear plate is made of one of aluminum (Al) and chromium (Cr).
7. The apparatus of claim 1 , wherein the rear plate is a surface plate chuck absorbing the substrate in a vacuum state.
8. The apparatus of claim 1 , further comprising:
a clamper fixing the substrate to the rear plate.
9. The apparatus of claim 1 , wherein the rear plate is tightly attached to the substrate.
10. An inspecting apparatus for a glass substrate comprising:
a first illumination unit supplying reflective light to a surface of the substrate to inspect whether the surface of the substrate is defective or not;
a second illumination unit supplying transmissive light from a rear side of the substrate to inspect whether the interior of the substrate is defective or not; and
a rear plate disposed on a rear surface of the substrate and generating a phase difference between the light provided from the first illumination unit and the light provided from the second illumination unit.
11. The apparatus of claim 10 , wherein the rear plate moves vertically or horizontally along the rear surface of the rear plate, and interferes with or scatters light provided from the first and second illumination units if the glass substrate is defective.
12. The apparatus of claim 11 , wherein the rear plate is separated within the range of 10 cm from the substrate and moved vertically or horizontally.
13. The apparatus of claim 10 , wherein the glass substrate to be inspected comprises one of a color filter substrate and a thin film transistor substrate.
14. The apparatus of claim 13 , wherein the rear plate comprises a lattice pattern and reflects light which has passed through the substrate after being provided from the first illumination unit.
15. The apparatus of claim 14 , wherein the rear plate is made of one of aluminum (Al) and chromium (Cr).
16. The apparatus of claim 10 , further comprising:
a clamper fixing the substrate to be inspected and the rear plate.