IP Library Granted Patent US 7,579,199
Granted Patent B2
US 7,579,199 · App. 12/004,404 · Granted Aug 25, 2009

TFT, flat panel display device having the same, method of manufacturing TFT, method of manufacturing flat panel display device, and method of manufacturing donor sheet

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Quick Facts
Patent No.
US 7,579,199
App. No.
12/004,404
Granted
Aug 25, 2009
Kind
B2
Abstract

A flexible flat panel display where nanoparticles are used for the active layer of the TFTs and the substrate is flexible and can be manufactured at room temperature, a flat panel display device having the same, a method of manufacturing a TFT, a method of manufacturing a flat panel display device, and a method of manufacturing a donor sheet. In making the TFTs in the display, a donor sheet is used to transfer the nanoparticles from the sheet to the substrate. The thin film transistor is placed on a substrate and includes a channel region which has at least one P-type or N-type nanoparticle arranged in a lengthwise direction, wherein the lengthwise direction of the P-type or N-type nanoparticles is parallel to a P-type or an N-type nanoparticle line partitioned off on the substrate.

Claims (54)

1. A method of manufacturing a thin film transistor, comprising:

partitioning a plurality of nanoparticle lines;

forming nanolayers on the nanoparticle lines, each nanoparticle line comprising a nanoparticle; and

forming an active layer by patterning the nanolayers.

2. The method of claim 1 , wherein the nanoparticle lines comprise P-type nanoparticle lines and N-type nanoparticle lines, and the nanolayers comprise P-type nanolayers and N-type nanolayers, and the P-type nanolayers and the N-type nanolayers, respectively, are arranged along the P-type nanoparticle lines and the N-type nanoparticle lines.

3. The method of claim 1 , a lengthwise direction of each of the nanoparticles being parallel to a lengthwise direction of each of the nanolayers.

4. The method of claim 1 , the nanoparticles being selected from the group consisting of nanowires, nanorods and nano-ribbons.

5. The method of claim 1 , each of the nanoparticle lines having a striped shape.

6. The method of claim 1 , the forming of the nanolayers comprises:

applying a solution comprising one of P-type nanoparticles and N-type nanoparticles along the nanoparticle lines; and

drying the coated solution.

7. The method of claim 1 , the forming of the nanolayers comprises:

forming a donor sheet comprising one of aligned P-type nanoparticles and aligned N-type nanoparticles;

aligning the donor sheet to a substrate, the substrate being an acceptor;

emitting a laser beam onto the donor sheet along the nanoparticle lines causing the nanoparticles to transfer from the donor sheet to the substrate according to a pattern formed by the laser beam; and

separating the donor sheet from the substrate.

8. The method of claim 7 , the forming of the donor sheet comprises:

preparing a film comprising a light-to-heat conversion layer on one side of the film;

preparing a water bank so that one of P-type nanoparticles and N-type nanoparticles float in a solution within the water bank;

collecting the nanoparticles at one side of the water bank;

allowing the film to travel through the solution in the water bank so that the nanoparticles become attached to the light-to-heat conversion layer of the film; and

drying the film.

9. A method of manufacturing a flat panel display device, comprising:

providing the flat panel display device comprising an emission region comprising a plurality of pixels and a selection driving circuit comprising a thin film transistor comprising a semiconductor active layer arranged in each of the pixels;

partitioning a plurality of nanoparticle lines;

forming nanolayers on one of said nanoparticle lines, each nanoparticle line comprising a nanoparticle; and

forming an active layer by patterning the nanolayers.

10. The method of claim 9 , each nanoparticle line comprises one of a P-type nanoparticle line and an N-type nanoparticle line, and each nanolayer comprises one of P-type nanolayers and N-type nanolayers, and the P-type nanolayers and the N-type nanolayers are formed along the P-type nanoparticle lines and the N-type nanoparticle lines, respectively.

11. The method of claim 9 , a lengthwise direction of each nanoparticle is parallel to a lengthwise direction of a corresponding nanolayer.

12. The method of claim 9 , the nanoparticles being selected from the group consisting of nanowires, nanorods and nano-ribbons.

13. The method of claim 9 , the plurality of nanoparticle lines being striped shape.

14. The method of claim 9 , wherein the forming of the nanolayers comprises:

applying a solution comprising one of P-type nanoparticles and N-type nanoparticles along the nanoparticle lines; and

drying the applied solution.

15. The method of claim 9 , wherein the forming of the nanolayers comprises:

forming a donor sheet comprising one of aligned P-type nanoparticles and N-type nanoparticles;

aligning the donor sheet to a substrate, the substrate serving as an acceptor for the nanoparticles;

emitting a laser beam onto the donor sheet along the nanoparticle lines causing nanoparticles exposed to the laser beam to transfer from the donor sheet to the substate; and

separating the donor sheet from the substrate.

16. The method of claim 9 , wherein the forming of the donor sheet comprises:

preparing a film comprising a light-to-heat conversion layer on one side thereof;

preparing a water bank comprising a solution comprising one of P-type nanoparticles and N-type nanoparticles;

collecting the nanoparticles in the solution to an alignment bar;

immersing the film into the solution in the water bank causing the nanoparticles to attach to the light-to-heat conversion layer of the film; and

drying the film.

17. The method of claim 16 , the film is formed in a rolled shape and is continuously scrolled through the solution in the water bank.

18. The method of claim 9 , each pixel comprising an organic light-emitting diode comprising an electrode that is electrically connected to the selection driving circuit.

19. A method of manufacturing a donor sheet, the method comprising:

preparing a film having one side formed of a light-to-heat conversion layer;

preparing a water bank comprising a solution comprising one of P-type nanoparticles and N-type nanoparticles;

collecting the nanoparticles to one side;

allowing the film to travel through the solution in the water bank so that the nanoparticles become attached to the light-to-heat conversion layer of the film; and

drying the film.

20. The method of claim 19 , the film is formed in a rolled shape and is continuously scrolled through the solution in the water bank.

Assignments (1)
MERGER Recorded Sep 21, 2012
From: SAMSUNG MOBILE DISPLAY CO., LTD.
To: SAMSUNG DISPLAY CO., LTD.
Reel/Frame 029241/0599 →