Image sensor and method of fabricating the same
View Patent ↗An image sensor includes a first photodiode formed in a semiconductor substrate at a depth reachable by red light, a second photodiode disposed on or over the first photodiode in the semiconductor substrate at a depth reachable by blue light, a third photodiode disposed adjacent to the second photodiode, a plug connected to the first photodiode, transistor structures on the semiconductor substrate and electrically connected with the first, second and third diodes, an insulating layer covering the transistor structures, and microlenses on the insulating layer.
1. A method of fabricating an image sensor, the method comprising the steps of:
forming an isolation pattern in a semiconductor substrate;
forming first and second photodiode regions at opposite sides of the isolation pattern;
implanting impurities into the first photodiode region of the semiconductor substrate at an implantation depth configured to detect light of a first wavelength, there by forming a first photodiode;
implanting impurities into the first photodiode region of the substrate above the first photodiode using a first mask completely covering the second photodiode region, at an implantation depth configured to detect light of a second wavelength shorter than the first wavelength, thereby forming a second photodiode in the first photodiode region;
implanting impurities into the second photodiode region using a second mask completely covering the first photodiode region and exposing the second photodiode region, thereby forming a third photodiode in the second photodiode region;
forming a plug in electrical contact with the first photodiode;
forming transistor structures on the semiconductor substrate such that the transistor structures are electrically connected with the first, third and second photodiodes;
forming an insulating layer covering the transistor structures; and
forming microlenses on the insulating layer.
2. The method as claimed in claim 1 , wherein forming the first photodiode comprises implanting ions at a first ion implantation energy, and forming the second photodiode comprises implanting ions at a second ion implantation energy lower than the first ion implantation energy.
3. The method as claimed in claim 1 , further comprising forming a high density impurity region between the first photodiode and the second photodiode so as to prevent the first and second photodiodes from interfering with each other.
4. The method as claimed in claim 3 , wherein the high density impurity region comprises a P-type ion, and the first and second photodiodes comprise an N-type ion.
5. The method of claim 1 , wherein implanting impurities into the second photodiode region comprises implanting impurities at an implantation depth configured to detect light of a third wavelength longer than the second wavelength.
6. The method of claim 5 , wherein the third wavelength is shorter than the first wavelength.
7. The method of claim 1 , wherein the second photodiode is formed on or near the surface of the semiconductor substrate.
8. The method of claim 5 , wherein the first, second and third wavelengths correspond to red, blue and green light, respectively.
9. The method of claim 5 , wherein the first second and third wavelengths correspond to magenta, cyan and yellow light, respectively.
10. The method of claim 1 , wherein the implantation depth configured to detect light of a first wavelength is between 0.7 μm and 1.5 μm from an upper surface of thesemiconductor substrate.
11. The method of claim 1 , wherein the implantation depth configured to detect light of a second wavelength is between 0.3 μm and 0.5 μm from an upper surface of the semiconductor substrate.
12. The method of claim 5 , wherein the implantation depth configured to detect light of a third wavelength is between 0.5 μm and 1.5 μm from an upper surface of the semiconductor substrate.
13. The method of claim 1 , wherein the plug comprises impurity ions.
14. The method of claim 13 , wherein the plug comprises N-type ions.
15. The method of claim 14 , wherein the plug comprises phosphorus, arsenic or antimony ions.
16. The method of claim 1 , further comprising forming a color filter in the second photodiode region.
17. The method of claim 1 , wherein the semiconductor substrate comprises an epitaxial layer.
18. The method of claim 17 , wherein the second and third photodiodes are formed in the epitaxial layer.