Method for production of thin-film semiconductor device
View Patent ↗Disclosed herein is a method for production of a thin-film semiconductor device which includes, a first step to form a gate electrode on a substrate, a second step to form a gate insulating film of silicon oxynitride on the substrate in such a way as to cover the gate electrode, a third step to form a semiconductor thin film on the gate insulating film, and a fourth step to perform heat treatment in an oxygen-containing oxidizing atmosphere for modification through oxygen binding with oxygen-deficient parts in the silicon oxynitride film constituting the gate insulating film.
1. A method for production of a thin-film semiconductor comprising:
a first step to form a gate electrode on a substrate;
a second step to form a gate insulating film of silicon oxynitride on said substrate in such a way as to cover said gate electrode;
a third step to form a semiconductor thin film on said gate insulating film; and
a fourth step to perform heat treatment in an oxygen-containing oxidizing atmosphere for modification through oxygen binding with oxygen-deficient parts in said silicon oxynitride film constituting said gate insulating film,
wherein the fourth step grows a thermal oxide film on the surface of said semiconductor thin film which has been formed by said heat treatment in the third step, and
wherein fourth step is followed by an additional step to form a source-drain by patterning from said thermal oxide film in a shape overlapping said gate electrode and by further pattering from a semiconductor thin film containing impurities, said source-drain being in contact with said semiconductor thin film and said patterning being performed at a position on said semiconductor thin film under which said gate electrode exists.
2. The method for production of a thin-film semiconductor device as defined in claim 1 , wherein the gate insulating film formed in the second step is a silicon oxynitride film.
3. The method for production of a thin-film semiconductor device as defined in claim 1 , wherein the fourth step is heat treatment that is performed in a steam atmosphere under pressure.
4. The method for production of a thin-film semiconductor device as defined in claim 1 , wherein the fourth step is followed by an additional step to form an upper gate insulating film on said semiconductor thin film and then form an upper gate electrode above said gate electrode, with said upper gate insulating film interposed between them.
5. The method for production of a thin-film semiconductor device as defined in claim 1 , wherein the fourth step is followed by an additional step to perform patterning on said semiconductor thin film through said thermal oxide film as a protective film.
6. The method for production of a thin-film semiconductor device as defined in claim 1 , wherein the fourth step is followed by an additional step to form an upper gate electrode above said gate electrode and on said thermal oxide film as an upper gate insulating film.