III nitride power device with reduced Q
View Patent ↗A III-nitride power switch that includes a III-nitride heterojunction, field dielectric bodies disposed over the heterojunction, and either gate conductive bodies that do not overlap the top surface of the field dielectric bodies or power contacts that do not overlap field dielectric bodies or both.
1. A III-nitride power semiconductor switch, comprising:
a III-nitride heterojunction that includes two III-nitride bodies having different band gaps from one another;
spaced field dielectric bodies disposed over a top surface of said two III-nitride bodies;
a first conductive body disposed in and filling a width of a first space between said field dielectric bodies, wherein said first conductive body does not overlap or extend above a top surface of said field dielectric bodies;
a second conductive body disposed in a second space between said field dielectric bodies, said second conductive body overlapping at least one of said field dielectric bodies;
an etch stop layer formed over a coplanar surface of said first conductive body and said field dielectric bodies.
2. The III-nitride power semiconductor switch of claim 1 , wherein said first conductive body includes a top surface that is coplanar with the top surfaces of said field dielectric bodies.
3. The III-nitride power semiconductor switch of claim 1 , wherein said first conductive body comprises a gate conductive body.
4. The III-nitride power semiconductor switch of claim 3 , further comprising a gate dielectric disposed in said first space between said gate conductive body and said III-nitride heterojunction.
5. The III-nitride power semiconductor switch of claim 1 , wherein said second conductive body comprises a power electrode.
6. The III-nitride power semiconductor switch of claim 1 , wherein said field dielectric bodies are coplanar.
7. The III-nitride power semiconductor switch of claim 1 , wherein said field dielectric bodies are formed completely over said III-nitride heterojunction.
8. A III-nitride power semiconductor device, comprising:
a III-nitride heterojunction;
a field dielectric body over said III-nitride heterojunction;
a first conductive body disposed in and touching said field dielectric body, wherein said first conductive body does not overlap or extend above said field dielectric body;
an etch stop layer formed over a coplanar surface of said first conductive body and said field dielectric body; and
a second conductive body disposed in said field dielectric body, said second conductive body overlapping said field dielectric body.
9. The III-nitride power semiconductor device of claim 8 , wherein said first conductive body includes a top surface that is coplanar with a top surface of said field dielectric body.
10. The III-nitride power semiconductor device of claim 8 , wherein said first conductive body comprises a gate conductive body.
11. The III-nitride power semiconductor device of claim 10 further comprising a gate dielectric disposed between said gate conductive body and said III-nitride heterojunction.
12. The III-nitride power semiconductor device of claim 1 , wherein said second conductive body comprises a power electrode.
13. A power semiconductor device, comprising:
a heterojunction forming a two-dimensional electron gas;
a field dielectric body disposed over said heterojunction;
a first conductive body on one side of said field dielectric body, wherein said conductive body does not overlap said field dielectric body;
a second conductive body overlapping a portion of said field dielectric body on another side of said field dielectric body; and
an etch stop layer formed over a coplanar surface of said field dielectric body and said first conductive body, said etch stop layer not disposed over said second conductive body.
14. The power semiconductor device of claim 13 , wherein said etch stop layer is formed over said portion of said field dielectric body overlapped by said second conductive body.
15. The power semiconductor device of claim 13 , comprising another field dielectric body, said second conductive body overlapping a portion of said another field dielectric body.
16. The power semiconductor device of claim 13 , wherein said first conductive body includes a top surface that is coplanar with a top surface of said field dielectric body.
17. The power semiconductor device of claim 13 , wherein said first conductive body comprises a gate conductive body.
18. The power semiconductor device of claim 17 further comprising a gate dielectric disposed between said gate conductive body and said heterojunction.
19. The power semiconductor device of claim 13 , wherein said second conductive body comprises a power electrode.