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App. No. 12/013,201 · Confirmation No. 8120

Illumination Sources for Lithography Systems

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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 Code Description Pages PDF
2012-10-15 ABN Abandonment 2 View
2012-02-16 CTFR Final Rejection 14 View
2012-02-16 SRFW Search information including classification, databases and other search related notes 1 View
2012-02-16 SRNT Examiner's search strategy and results 1 View
2012-01-17 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2012-01-17 CLM Claims 8 View
2012-01-17 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2012-01-17 WFEE Fee Worksheet (SB06) 2 View
2012-01-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2012-01-17 WFEE Fee Worksheet (SB06) 1 View
2011-11-29 CTNF Non-Final Rejection 13 View
2011-11-29 892 List of references cited by examiner 1 View
2011-11-29 SRNT Examiner's search strategy and results 1 View
2011-11-29 SRFW Search information including classification, databases and other search related notes 1 View
2011-11-16 RCEX Request for Continued Examination (RCE) 1 View
2011-11-16 WFEE Fee Worksheet (SB06) 2 View
2011-11-16 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-11-16 WFEE Fee Worksheet (SB06) 1 View
2011-11-03 CTAV Advisory Action (PTOL-303) 3 View
2011-11-03 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2011-10-11 A.NE Response After Final Action 1 View
2011-10-11 SPEC Specification 1 View
2011-10-11 CLM Claims 7 View
2011-10-11 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2011-10-11 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-10-11 WFEE Fee Worksheet (SB06) 1 View
2011-09-01 CTFR Final Rejection 15 View
2011-09-01 SRNT Examiner's search strategy and results 1 View
2011-09-01 SRFW Search information including classification, databases and other search related notes 1 View
2011-07-12 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2011-07-12 CLM Claims 6 View
2011-07-12 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2011-07-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-07-12 WFEE Fee Worksheet (SB06) 1 View
2011-06-17 CTNF Non-Final Rejection 10 View
2011-06-17 892 List of references cited by examiner 1 View
2011-06-17 SRFW Search information including classification, databases and other search related notes 1 View
2011-06-17 SRNT Examiner's search strategy and results 2 View
2011-05-13 RCEX Request for Continued Examination (RCE) 1 View
2011-05-13 WFEE Fee Worksheet (SB06) 2 View
2011-05-13 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-04-25 CTAV Advisory Action (PTOL-303) 3 View
2011-04-25 ANE.I Amendment After Final or under 37CFR 1.312, initialed by the examiner. 1 View
2011-04-12 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2011-04-12 SPEC Specification 1 View
2011-04-12 CLM Claims 6 View
2011-04-12 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2011-04-12 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-03-10 CTFR Final Rejection 11 View
2011-03-10 SRFW Search information including classification, databases and other search related notes 1 View
2011-03-10 SRNT Examiner's search strategy and results 1 View
2010-12-21 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2010-12-21 CLM Claims 6 View
2010-12-21 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2010-12-21 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-12-21 WFEE Fee Worksheet (SB06) 1 View
2010-10-01 CTNF Non-Final Rejection 9 View
2010-10-01 892 List of references cited by examiner 1 View
2010-10-01 SRFW Search information including classification, databases and other search related notes 1 View
2010-10-01 1449 List of References cited by applicant and considered by examiner 1 View
2010-10-01 SRNT Examiner's search strategy and results 2 View
2010-09-17 ELC. Response to Election / Restriction Filed 1 View
2010-09-17 CLM Claims 5 View
2010-09-17 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2010-09-17 WFEE Fee Worksheet (SB06) 2 View
2010-09-17 N417 Electronic Filing System Acknowledgment Receipt 2 View
2010-09-17 WFEE Fee Worksheet (SB06) 1 View
2010-08-27 CTRS Requirement for Restriction/Election 5 View
2009-07-16 NTC.PUB Notice of Publication 1 View
2008-02-04 APP.FILE.REC Filing Receipt 3 View
2008-01-11 TRAN.LET Transmittal Letter 1 View
2008-01-11 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2008-01-11 DRW Drawings-only black and white line drawings 6 View
2008-01-11 WFEE Fee Worksheet (SB06) 2 View
2008-01-11 N417 Electronic Filing System Acknowledgment Receipt 3 View
2008-01-11 SPEC Specification 19 View
2008-01-11 CLM Claims 6 View
2008-01-11 ABST Abstract 1 View
2008-01-11 136A Authorization for Extension of Time all replies 3 View
2008-01-11 OATH Oath or Declaration filed 3 View
2008-01-11 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
12/013,201
Filed
2008-01-11
Pub. No.
US20090180088A1
Art Unit
2882