Solution spray apparatus and solution spray method
View Patent ↗A solution spray apparatus includes a nozzle which sprays a droplet of a solution such as EL solution, a heater is provided on the nozzle to heat the solution in the nozzle to a temperature lower than a boiling point of the solution in the nozzle, so that the droplet of the heated solution is ejected from the spray to an object.
1. A solution spray apparatus comprising:
a table which supports a substrate having an electrode;
at least one nozzle which sprays at least one droplet of a solution containing an EL material and a solvent onto the electrode of the substrate;
a heating-insulating unit which heats the table to vaporize the solvent and insulates the table;
a driving device which moves the table; and
a heat insulator which is interposed between the heating-insulating unit and the driving device.
2. A spraying method comprising:
heating a solution containing an EL material and a solvent;
supplying the heated solution to a nozzle;
spraying the heated solution from the nozzle onto an electrode of a substrate on a table;
heating the table to vaporize the solvent by a heating-insulating unit; and
moving the table by a driving device;
wherein the driving device is thermally insulated from the heating-insulation unit by a heat insulator interposed between the heating-insulating unit and the driving device.
3. The method according to claim 2 , wherein a temperature of the solution in the nozzle is kept lower than a boiling point of the solution.
4. The method according to claim 2 , wherein a temperature of the solution sprayed from the nozzle is kept higher than a temperature of the solution in the nozzle.
5. A spraying method comprising:
heating a solution containing an EL material and a solvent in a nozzle to a temperature that is lower than a boiling point of the solution;
spraying the heated solution from the nozzle onto an electrode of a substrate on a table;
heating the table to vaporize the solvent by a heating-insulating unit; and
moving the table by a driving device;
wherein the driving device is thermally insulated from the heating-insulating unit by a heat insulator interposed between the heating-insulating unit and the driving device.
6. A spraying method comprising:
detecting a temperature of a nozzle;
controlling a temperature of a solution containing an EL material and a solvent in the nozzle to fall within a predetermined temperature range, based on the detected temperature of the nozzle;
spraying the solution toward an electrode of a substrate on a table from the nozzle;
heating the table to vaporize the solvent by a heating-insulating unit; and
moving the table by a driving device;
wherein the driving device is thermally insulated from the heating-insulating unit by a heat insulator interposed between the heating-insulating unit and the driving device.
7. An EL layer forming apparatus comprising:
a table which supports a substrate having an electrode;
at least one nozzle which sprays at a solution containing an EL material and a solvent toward the electrode of the substrate;
a heating unit which heats the table to vaporize the solvent;
a driving device which moves the table; and
a heat insulator which is interposed between the heating unit and the driving device.
8. The apparatus according to claim 7 , wherein the nozzle sprays the solution as a droplet.
9. The apparatus according to claim 7 , wherein the heating unit heats the atmosphere above the substrate.
10. The apparatus according to claim 7 , further comprising:
a temperature detector which detects a temperature of the nozzle; and
a temperature controller which controls a temperature of the solution in the nozzle based on the temperature of the nozzle detected by the temperature detector.
11. An EL layer forming apparatus comprising:
a table which supports a substrate;
at least one nozzle which sprays a solution containing an EL material and a solvent toward an electrode of the substrate;
a heating unit which heats the table to dry the solution by vaporizing the solvent;
a driving device which moves the table; and
a heat insulator which is interposed between the heating unit and the driving device.
12. The apparatus according to claim 11 , wherein the nozzle sprays the solution as a droplet.
13. The apparatus according to claim 11 , wherein the heating unit heats the atmosphere above the substrate.
14. The apparatus according to claim 11 , further comprising:
a temperature detector which detects a temperature of the nozzle; and
a temperature controller which controls a temperature of the solution in the nozzle based on the temperature of the nozzle detected by the temperature detector.
15. A method of forming an EL layer comprising:
spraying a solution containing an EL material and a solvent toward an electrode of a substrate which is supported on a table;
heating the table to vaporize the solvent to deposit the EL material by a heating unit; and
moving the table by a driving device;
wherein the driving device is thermally insulated from the heating unit by a heat insulator interposed between the heating unit and the driving device.
16. The method according to claim 15 , wherein the solution is sprayed as a droplet.
17. The method according to claim 15 , wherein the heated table heats the atmosphere above the substrate.
18. The method according to claim 15 , wherein the solution is heated before spraying.