Method of fabricating an ink jet nozzle with a heater element
View Patent ↗The invention relates to a method of fabricating an ink jet nozzle. The method includes the steps of depositing and etching a passivation layer on a silicon substrate having drive circuitry and an interlayer dielectric interconnect to form a first sacrificial scaffold. Also included are the steps of depositing heater material over the first sacrificial scaffold and etching said heater material to define a heater element, and depositing and developing a layer of photoresist to define a second sacrificial scaffold defining sidewalls for a nozzle chamber. The method also includes the steps of depositing silicon nitride onto the second sacrificial scaffold to form a roof over the nozzle chamber, and etching a nozzle aperture through the roof down to the second sacrificial scaffold.
1. A method of fabricating an ink jet nozzle, the method comprising the steps of:
depositing and etching a passivation layer on a silicon substrate having drive circuitry and an interlayer dielectric interconnect;
depositing and selectively exposing a photoresist layer over the passivation layer to form a first sacrificial scaffold;
depositing heater material over the first sacrificial scaffold and etching said heater material to define a heater element;
depositing and developing a layer of photoresist to define a second sacrificial scaffold defining sidewalls for a nozzle chamber;
depositing silicon nitride onto the second sacrificial scaffold to form a roof over the nozzle chamber; and
etching a nozzle aperture through the roof down to the second sacrificial scaffold.
2. The method of claim 1 , including the step of depositing and developing a third sacrificial scaffold over the roof to define a trench around the nozzle aperture.
3. The method of claim 2 , including the step of depositing silicon nitride onto the third sacrificial scaffold and into the trench by plasma enhanced chemical vapour deposition to form an enclosure roof over the nozzle aperture and sidewalls around the nozzle aperture.
4. The method of claim 1 , including the step of etching an ink supply channel from the backside of the substrate to the ink chamber, and removing the first and second sacrificial scaffolds using O 2 plasma.
5. The method of claim 4 , wherein the interconnect includes four metal layers which together form a seal ring for the supply channel, said metal seal ring preventing ink moisture from seeping into the interconnect when the supply channel is filled with ink.
6. The method of claim 1 , wherein the first sacrificial scaffold is UV cured and hardbaked to prevent reflow of the photoresist during subsequent high-temperature deposition onto its upper surface.
7. The method of claim 1 , wherein the second sacrificial scaffold is UV cured and hardbaked to prevent any reflow of the photoresist during subsequent high-temperature deposition of the silicon nitride roof material.
8. The method of claim 1 , wherein a layer of hydrophobic material is deposited onto the roof after deposition of the silicon nitride.