Forming an electrowetting module having a hydrophilic grid
A method of forming a matrix of electrowetting pixels includes forming a patterned layer of electrodes ( 512 ) on a substrate ( 510 ) and forming a patterned insulating layer ( 514 ) on the electrodes ( 512 ) and the substrate ( 510 ) to define a plurality of wells ( 516 ), each of the wells ( 516 ) aligned over one of the electrodes ( 512 ). A hydrophobic material ( 518 ) is formed on the bottom surfaces of the wells ( 516 ) and a hydrophilic material ( 526 ) is formed on sidewalls ( 519 ) of the wells ( 516 ), for example by one of selective reaction, selective deposition and selective etching, by the application of a beam ( 524 ) at an angle to impact the sidewalls ( 519 ) while substantially avoiding impacting the bottom surface ( 515 ). First and second liquids ( 532, 534 ) are disposed within the wells ( 516 ), the first liquid being not soluble in the second liquid.
1. A method of forming a matrix of electrowetting pixels, comprising:
patterning a base material defining a plurality of wells having a bottom surface and sidewalls;
forming a hydrophobic material on the bottom surface;
applying a beam upon the sidewalls at an angle to form a hydrophilic material on the sidewalls; and
disposing first and second fluids within the wells, the second fluid insoluble in the first fluid.
2. The method of claim 1 wherein the applying step comprises coating the hydrophobic material on the sidewalls, and converting the hydrophobic material on the sidewalls to a hydrophilic material.
3. The method of claim 2 wherein the applying a beam converts the hydrophobic material to a hydrophilic material by adding hydroxyl groups, and an injection of polar molecules capable of hydrogen bonding.
4. The method of claim 1 wherein the applying step comprises:
coating a hydrophobic material on the sidewalls; and
applying a reactive gas that forms a hydrophilic material on the hydrophobic material.
5. The method of claim 1 wherein the beam comprises one of an ion beam, a molecular beam, a laser beam, an ultra violet beam, and an x-ray beam.
6. The method of claim 1 wherein the first liquid comprises water and the second liquid comprises oil.
7. A method of forming a matrix of electrowetting pixels, comprising:
forming a patterned layer of electrodes on a substrate;
forming a patterned insulating material on the electrodes and the substrate to define a plurality of wells;
applying a beam to sidewalls of the wells to form a hydrophilic material on the sidewalls while forming a hydrophobic material on bottom surfaces of the wells; and
placing first and second liquids within the wells, the second liquid being insoluble in the first liquid.
8. The method of claim 7 wherein the applying step comprises coating a hydrophobic material on the surface of the insulating material, wherein the applying a beam converts the hydrophobic material on the sidewalls to a hydrophilic material.
9. The method of claim 8 wherein the applying a beam converts the hydrophobic material to a hydrophilic material by adding hydroxyl groups, and an injection of polar molecules capable of hydrogen bonding.
10. The method of claim 7 wherein the applying step comprises:
coating a hydrophobic material on the surface of the insulating material; and applying a reactive gas that forms a hydrophilic material on the hydrophobic material.
11. The method of claim 7 wherein the beam comprises one of an ion beam, a molecular beam, a laser beam, an ultra violet beam, and an x-ray beam.
12. The method of claim 7 wherein the first liquid comprises water and the second liquid comprises oil.
13. A method of forming a matrix of electrowetting pixels, comprising:
forming a patterned layer of electrodes on a substrate;
forming a patterned insulating layer on the electrodes and the substrate to define a plurality of wells, each of the wells aligned over one of the electrodes;
forming a hydrophobic material on the bottom surfaces of the wells and a hydrophilic material on sidewalls of the wells by the application of a beam at an angle to impact the sidewalls while substantially avoiding impacting the bottom surface;
placing first and second liquids within the wells, the second liquid insoluble in the first liquid.
14. The method of claim 13 wherein the applying step comprises coating a hydrophobic material on the surface of the insulating material, wherein the applying a beam converts the hydrophobic material on the sidewalls to a hydrophilic material.
15. The method of claim 14 wherein the applying a beam converts the hydrophobic material to a hydrophilic material by adding hydroxyl groups, and an injection of polar molecules capable of hydrogen bonding.
16. The method of claim 13 wherein the applying step comprises:
coating a hydrophobic material on the surface of the insulating material; and
applying a reactive gas that forms a hydrophilic material on the hydrophobic material.
17. The method of claim 13 wherein the beam comprises one of an ion beam, a molecular beam, a laser beam, an ultra violet beam, and an x-ray beam.
18. The method of claim 13 wherein the first liquid comprises water and the second liquid comprises oil.