Gallium nitride material structures including substrates and methods associated with the same
View Patent ↗Gallium nitride material-based semiconductor structures are provided. In some embodiments, the structures include a composite substrate over which a gallium nitride material region is formed. The gallium nitride material structures may include additional features, such as strain-absorbing layers and/or transition layers, which also promote favorable stress conditions. The reduction in stresses may reduce defect formation and cracking in the gallium nitride material region, as well as reducing warpage of the overall structure. The gallium nitride material-based semiconductor structures may be used in a variety of applications such as transistors (e.g. FETs) Schottky diodes, light emitting diodes, laser diodes, SAW devices, and sensors, amongst others devices.
1. A gallium nitride material semiconductor structure comprising:
a polycrystalline region;
a crystalline layer formed on the polycrystalline region;
an amorphous layer formed on the crystalline layer; and
a crystalline gallium nitride material region formed on the amorphous layer.
2. The structure of claim 1 , comprising a substrate including the polycrystalline region and the crystalline layer.
3. The structure of claim 1 , wherein the crystalline layer is a silicon layer.
4. The structure of claim 1 , wherein the crystalline layer has a cubic structure.
5. The structure of claim 1 , wherein the polycrystalline region comprises a semiconductor material.
6. The structure of claim 1 , wherein the crystalline layer comprises a semiconductor material.
7. The structure of claim 1 , wherein the amorphous layer comprises a nitride-based material.
8. The structure of claim 1 , wherein the amorphous layer comprises silicon nitride.
9. The structure of claim 1 , wherein the amorphous layer has a thickness of less than 100 Angstroms.
10. The structure of claim 1 , wherein the amorphous layer is formed directly on the crystalline layer.
11. The structure of claim 1 , wherein the gallium nitride material region has a thickness of greater than 1.5 micron and a crack level of less than about 0.001 micron/micron 2 .
12. The structure of claim 1 , wherein the gallium nitride material region comprises at least one gallium nitride material layer having a hexagonal structure.