Gallium nitride material devices including diamond regions and methods associated with the same
View Patent ↗Gallium nitride material structures are provided, as well as devices and methods associated with such structures. The structures include a diamond region which may facilitate conduction and removal of heat generated within the gallium nitride material during device operation. The structures described herein may form the basis of a number of semiconductor devices and, in particular, transistors (e.g., FETs).
1. A gallium nitride material device structure comprising:
a gallium nitride material region;
a plurality of electrical contacts associated with the gallium nitride material region;
a diamond region formed over the plurality of electrical contacts and formed on at least one of the plurality of electrical contacts, wherein the plurality of electrical contacts include a source electrode, gate electrode and drain electrode, and the diamond region is formed on the source electrode, gate electrode and drain electrode, and wherein the diamond region is formed directly on the source electrode, gate electrode and drain electrode.
2. A gallium nitride material device structure comprising:
a gallium nitride material region;
a nucleation layer formed over the gallium nitride material region, the nucleation layer having a window defined therein exposing a portion of the gallium nitride material region;
a diamond region formed on the nucleation layer, wherein the gallium nitride material region in the window is substantially free of diamond being formed thereon, and wherein the nucleation layer enables formation of the diamond region thereon, wherein the device includes a source electrode, gate electrode and drain electrode, and the diamond region is formed over the source electrode, gate electrode and drain electrode, and wherein the diamond region is formed directly on source electrode, gate electrode and drain electrode.
3. A gallium nitride material device structure comprising:
a gallium nitride material region;
an electrical contact associated with the gallium nitride material region;
a heat sink;
a diamond region formed on the electrical contact, the diamond region arranged to conduct heat generated within the gallium nitride material region to the heat sink, wherein an electrically conductive pathway extends through the thickness of the gallium nitride material region, wherein the device includes a plurality of electrical contacts including a source electrode, gate electrode and drain electrode, and the diamond region is formed on the source electrode, gate electrode and drain electrode, and wherein the diamond region is formed directly on source electrode, gate electrode and drain electrode.